Transfer processes in glow discharge of reactive gases
Journal of Samara State Technical University, Ser. Physical and Mathematical Sciences, Journal of Samara State Technical University, Ser. Physical and Mathematical Sciences, no. 30 (2004), pp. 150-165.

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V. B. Oparin. Transfer processes in glow discharge of reactive gases. Journal of Samara State Technical University, Ser. Physical and Mathematical Sciences, Journal of Samara State Technical University, Ser. Physical and Mathematical Sciences, no. 30 (2004), pp. 150-165. http://geodesic.mathdoc.fr/item/VSGTU_2004_30_a13/

[1] Tkachuk B. V., Kolotyrkin V. M., Poluchenie tonkikh polimernykh plenok iz gazovoi fazy, Khimiya, M., 1977

[2] Yasuda Kh., Polimerizatsiya v plazme, Mir, M., 1988

[3] Cooper C. B. (ed.), “Proceedings of the Workshop on High-density Plasma Techniques and Processes for Integrated Circuit Fabrication”, J. Vac. Sci. and Technol. B, 9:2 (1991), 309–384, Burlingame, Calif., 1990, Pt. 1

[4] Liepins R., Sakaoku K., “Submicron Polymer Powder in Electrodeless RF Induced Plasma Initiated Polymerization”, J. Appl. Polym. Sci., 16:10 (1972), 2633–2645 | DOI

[5] Zolotukhin I. V., “Fraktaly v fizike tverdogo tela”, Sorosovskii Obrazovatelnyi zhurnal, 1998, no. 7, 108–113

[6] Zyn V. I., Oparin V. B. Potapov V. K. i dr., “Kinetika gazorazryadnoi polimerizatsii i protsessy perenosa v parakh ftoruglerodnykh i kremniiorganicheskikh soedinenii”, Tez. Dokl. 1 Vses. Simp. po makrokinetike i khimicheskoi gazodinamike, T. 2, 386, OIKhF AN SSSR, Chernogolovka, 1984, 50

[7] Zyn V. I., Oparin V. B., Potapov V. K., Tuzov L. S., “Mass-spektrometricheskoe issledovanie kinetiki gazorazryadnykh khimicheskikh reaktsii v TFE”, Khimiya vysokikh energii, 19:4 (1985), 374–378

[8] Oparin V. B., “Kineticheskaya mass-spektrometriya molekulyarnykh produktov polimerizatsii ftoruglerodov v tleyuschem razryade (tezisy)”, Tez. dokl. 4 Vses. konfer. po mass-spektrometrii, Sumy, 1986, 78–79

[9] Zyn V. I., Oparin V. B., Potapov V. K., “Kineticheskaya mass-spektrometriya molekulyarnykh produktov polimerizatsii ftoruglerodov v tleyuschem razryade”, Khimiya vysokikh energii, 23:1 (1989), 75–80

[10] Blinow L. M., Golovkin A. G., Kaganov L. I. et al., “Tetrachlorosilane consumption in radio frequency glow dischchfrge”, Plasma Chem. A. Plasma Proc., 18:2 (1998), 509–533 | DOI

[11] Oparin V. B., Kinetika polimerizatsii TFE i GFB v NCh-tleyuschem razryade, Dis. $\dots$ kand. fiz.-mat. nauk, M., 1988

[12] Shterenberg A. M., Potapov V. K., Makrokinetika formirovaniya dispersnoi fazy v gazorazryadnykh sistemakh, SamGTU, Samara, 1997

[13] Zyn V. I., Dis. $\dots$ dok. fiz.-mat. nauk, M., 1995

[14] Zyn V. I., Oparin V. B., Potapov V. K., Tuzov L. S., “Prostranstvennoe raspredelenie polimerizatsionnykh protsessov v reaktore tleyuschego razryada”, Khimiya vysokikh energii, 23:3 (1989), 276–281

[15] Zyn V. I., Oparin V. B., “Effekt teni pri polimerizatsii v katodnoi plazme tleyuschego razryada”, Khimiya vysokikh energii, 35:4 (2001), 313–314

[16] Zyn V. I., Oparin V. B., Parkin A. A., “Razvitie mekhanicheskikh napryazhenii v plenkakh pri gazorazryadnoi polimerizatsii”, Poverkhnost. Fizika, khimiya, mekhanika, 1984, no. 4, 66–72

[17] Zyn V. I., Oparin V. B, Parkin A. A. i dr., “Proyavlenie gazorazryadnogo podobiya v napryazhennykh plenkakh, poluchennykh polimerizatsiei v tleyuschem razryade”, Khimiya vysokikh energii, 18:5 (1984), 472–475

[18] Shterenberg A. M., Makrokinetika formirovaniya dispersnoi fazy v ob'eme gazorazryadnykh sistem ponizhennogo davleniya, Dis. $\dots$ dok.fiz.-mat. nauk, M., 1995

[19] Slovetskii D. I., “Mekhanizmy khimicheskikh reaktsii v neravnovesnoi ftorsoderzhaschei plazme”, Vyp. 10, Khimiya plazmy, Energoizdat, M., 1983, 108–146

[20] Vinogradov G. K., Slovetskii D. I., Fedoseeva T. V., “Eksperimentalnoe issledovanie parametrov plazmy tleyuschego razryada v tetraftormetane”, Teplofizika vysokikh temperatur, 21:6 (1983), 1083–1090

[21] H. Kobayashi, A. T. Bell, M. Shen, Macromolecules, 7 (1974), 277 | DOI

[22] Goncharenko A. A., Slovetskii D. I., “Eksperimentalnoe issledovanie parametrov emkostnogo VCh razryada vo ftorsoderzhaschikh gazakh”, Khimiya vysokikh energii, 18:4 (1984), 368–375

[23] Slovetskii D. I., Deryugin A. A., “Modelirovanie mekhanizma razlozheniya tetraftormetana v tleyuschem razryade”, Khimiya vysokikh energii, 16:6 (1982), 540–546

[24] Slovetskii D. I., “Dissotsiatsiya elektronnym udarom”, Khimiya plazmy, Vyp. 4, ed. Smirnov B. M., Atomiizdat, M., 1977, 156–202

[25] Slovetskii D. I., “Kinetika obrazovaniya i gibeli produktov razlozheniya tetraftormetana v neravnovesnykh gazovykh razryadakh”, Khimiya vysokikh energii, 15:6 (1981), 560–562

[26] Slovetskii D. I., Mekhanizmy khimicheskikh reaktsii v neravnovesnoi plazme, Nauka, M., 1980

[27] Aleksandrov D. E., Model gazofaznykh protsessov v SVCh razryade ponizhennogo davleniya $\mathrm{O}_2/\mathrm{Si}\mathrm{Cl}_4\mathrm{S}\mathrm{F}_6$ pri osazhdenii sloev, Dis. $\dots$ kand. fiz. -mat. nauk, IOFAN SSSR, M., 1987

[28] Vinogradov G. K., Ivanov Yu. A., Polak L. S., “O zondovom metode issledovaniya plenkoobrazovaniya”, Khimiya vysokikh energii, 13:1 (1979), 84–85

[29] Vinogradov G. K., Ivanov Yu. A., Polak L. S., Timakin V. N., “Prostranstvennoe raspredelenie i kinetika plenkoobrazovaniya v tleyuschem razryade”, Tez.dokl. 3 Vsesoyuzn. Simpoz. po plazmokhimii, M., 1979, 20–24

[30] Zyn V. I., “Sedimentatsionnye effekty pri gazorazryadnoi polimerizatsii”, Khim. fizika, 1:12 (1982), 1674–1681

[31] Vinogradov G. K. i dr., “Issledovanie prostranstvennykh raspredelenii skorosti plenkoobrazovaniya v razryadakh ponizhennogo davleniya”, Khimiya vysokikh energii, 14:5 (1980), 461–468

[32] Zyn V. I., Potapov V. K., Tuzov L. S., Shterenberg A. M., “Obrazovanie, dvizhenie i kondensatsiya kremniiorganicheskikh polimernykh aerozolei v tleyuschem razryade”, Khimiya vysokikh energii, 20:6 (1986), 541–547

[33] Schurov A. N., Nikolaev V. I., Kolotyrkin V. M. i dr., “Zaryad dispersnykh polimernykh chastits v tleyuschem razryade”, Zhurn. fiz. khimii, 53:4 (1979), 930–934

[34] Rusanov V. D., Fridman A. A., Fizika khimicheski aktivnoi plazmy, Nauka, M., 1984

[35] Raizer Yu. P., Fizika gazovogo razryada, Nauka, M., 1987

[36] Slovetskii D. I., Epshtein I. L., “Vliyanie radialnoi diffuzii na khimicheskie reaktsii v tleyuschem razryade. Razlozhenie tetraftormetana”, Khimiya vysokikh energii, 18:2 (1984), 146–150

[37] Saksonskii V. A., Kinetika polimerizatsii ryada uglevodorodov v VCh- razryade nizkogo davleniya, Dis. $\dots$ kand. fiz.-mat., M., 1985

[38] Zyn V. I., Potapov V. K., Tuzov L. S., Shterenberg A. M., “Obrazovanie, dvizhenie i kondensatsiya kremniiorganicheskikh polimernykh aerozolei v tleyuschem razryade”, Khimiya vysokikh energii, 20:6 (1986), 541–547

[39] Liepins R., Sakaoku K., “Submicron Polymer Powder in Electrodeless RF Induced Plasma Initiated Polymerization”, J. Appl. Polym. Sci., 16:10 (1972), 2633–2645 | DOI

[40] Thompson L. F., Mayhan K. G., “The Plasma Polymerization of Vinyl Monomers. 2. A Detailed Study of the Plasma Polymerizatiom of Sterene”, J. Appl. Polym. Sci., 16:9 (1972), 2317–2341 | DOI

[41] Kobayashi H., Bell A. N., Shen M., “Formation of an Amorphous Powder During the Polymerization of Ethylene in a RF Discharge”, J. Appl. Polym. Sci., 17:3 (1973), 885–899 | DOI

[42] Kawasaki H., Fukuzama T., Tsuruoka H. et al., “Investingation of Particulate Growth Processes in RF Silane Plasmas Using Light and Scanning Electron Microscopic Methods”, Jap. J. Appl. Phys., 33 (1994), 4198–4201, Pt. 1 | DOI

[43] Wrobel A. M., Wertheimer M. R., Dib J., “Polymerization of Organosilicones in Microwave Discharges/Schreiber”, J. Macromol. Sci. Chem., 14:3 (1980), 321–337 | DOI

[44] Ivanov Yu.A., Lebedev Yu.A., Polak L.S., Metody kontaktnoi diagnostiki v neravnovesnoi plazmokhimii, Nauka, M., 1981

[45] Ivanov Yu. A., “Geterogennye stadii protsessa plazmokhimicheskoi polimerizatsii v tleyuschem razryade”, Primenenie nizkotemperaturnoi plazmy v khimii, Nauka, M., 1981, 53–59

[46] Ivanov Yu. A., Epshtein I. L., “Usloviya obrazovaniya poroshka v tleyuschikh razryadakh v uglevodorodakh”, Khimiya vysokikh energii, 18:5 (1984), 462–467

[47] Garanin G. S., Ivanov Yu. A., Timakin V. N., “Issledovanie roli makrochastits v protsesse plazmokhimicheskoi polimerizatsii”, Khimiya vysokikh energii, 15:3 (1981), 183–184

[48] Sivukhin A. V., Obschii kurs fiziki, T. 2, Nauka, M., 1990