The kinetics of the reactions in a ductless discharge
Journal of Samara State Technical University, Ser. Physical and Mathematical Sciences, Journal of Samara State Technical University, Ser. Physical and Mathematical Sciences, no. 4 (1996), pp. 184-203.

Voir la notice de l'article provenant de la source Math-Net.Ru

@article{VSGTU_1996_4_a17,
     author = {V. I. Zsin},
     title = {The kinetics of the reactions in a ductless discharge},
     journal = {Journal of Samara State Technical University, Ser. Physical and Mathematical Sciences},
     pages = {184--203},
     publisher = {mathdoc},
     number = {4},
     year = {1996},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/VSGTU_1996_4_a17/}
}
TY  - JOUR
AU  - V. I. Zsin
TI  - The kinetics of the reactions in a ductless discharge
JO  - Journal of Samara State Technical University, Ser. Physical and Mathematical Sciences
PY  - 1996
SP  - 184
EP  - 203
IS  - 4
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/VSGTU_1996_4_a17/
LA  - ru
ID  - VSGTU_1996_4_a17
ER  - 
%0 Journal Article
%A V. I. Zsin
%T The kinetics of the reactions in a ductless discharge
%J Journal of Samara State Technical University, Ser. Physical and Mathematical Sciences
%D 1996
%P 184-203
%N 4
%I mathdoc
%U http://geodesic.mathdoc.fr/item/VSGTU_1996_4_a17/
%G ru
%F VSGTU_1996_4_a17
V. I. Zsin. The kinetics of the reactions in a ductless discharge. Journal of Samara State Technical University, Ser. Physical and Mathematical Sciences, Journal of Samara State Technical University, Ser. Physical and Mathematical Sciences, no. 4 (1996), pp. 184-203. http://geodesic.mathdoc.fr/item/VSGTU_1996_4_a17/

[1] Slovetskii D. I., Mexanizmy khimicheskikh reaktsii v neravnovesnoi plazme, Nauka, M., 1980

[2] Miller L. L., “Organic Plasma Chemistry”, Accounts Chem. Res., 16:6 (1983), 189–194 | DOI

[3] Kravchenko Yu. S., Osadchuk V. S., Slovetskii D. I., Taranov S. V., “Kinetika obrazovaniya i gibeli atomov i molekul khlora, khloruglerodnykh radikalov v tleyuschem razryade”, Khimiya vysokikh energii, 23:6 (1989), 539–544

[4] Saksonskii V. A., Schurov A. N., Potapov V. K., “Osobennosti kinetiki osazhdeniya polimernykh plenok v impulsnom VCh razryade”, Dokl. AN SSSR, 280:1 (1985), 137–140

[5] Saksonskii V. A., Schurov A. N., Chernyaeva G. A., Potapov V. K., “Kinetika obrazovaniya melkodispersnoi fazy v tleyuschem razryade”, Khimicheskaya fizika, 5:11 (1986), 1549–1554

[6] Slovetskii D. I., Deryugin A. A., “FREE i vzaimodeistvie elektronov s mnogoatomnymi ftorsoderzhaschimi gazami”, Khimiya plazmy, 13, Energoatomizdat, M., 1987, 240–277

[7] Ivanov Yu. A., Soldatova I. V., Epshtein I. L., “Chislennoe modelirovanie kinetiki prevrascheniya metana v tleyuschem razryade”, Khimiya vysokikh energii, 19:5 (1985), 465–470

[8] Aleksandrov D. E., Model gazofaznykh protsessov v SVCh razryade ponizhennogo davleniya $\mathrm{O}_2/\mathrm{SiCl}_4/\mathrm{SF}_6$ pri osazhdenii sloev, Dis. $\dots$ kand. fiz.-.mat. nauk, IOF AN SSSR, M., 1987

[9] Ivanov Yu. A., Lebedev Yu. A., Polak L. S., Metody kontaktnoi diagnostiki v neravnovesnoi plazmokhimii, Nauka, M., 1981

[10] Kay E., “Recent Progress in Fluorocarbon and Hydrocarbon Plasma Chemistry”, Amer. Chem. Soc. Poiym. Prepr., 21:2 (1980), 64–76 | MR

[11] Toshibana K., Nishida M., Harima H., Urano Y., “Diagnostics and Modelling of a Methane Plasma Used in the CVD of Amorphous Carbon Films”, J. Phys. D. Appl. Phys., 17:8 (1984), 1727–1742 | DOI

[12] Lergon H. G., Venugopalan M., “Mass spectrometer – wall probe diagnostics of $\mathrm{Ar}$ discharges containing $\mathrm{SF}_6$, and/or $\mathrm{O}_2$: reactive ions in etching plasmas”, Plasma Chem. Plasma. Proc., 4:2 (1984), 107–118 | DOI

[13] Vinogradov G. K., Slovetskii D. I., Fedoseeva T. V., “Eksperimentalnoe issledovanie parametrov plazmy tleyuschego razryada v tetraftormetane”, Teplofizika vysokikh temperatur, 21:6 (1983), 1083–1090

[14] Slovetskii D. I., “Mekhanizmy khimicheskikh reaktsii v neravnovesnoi ftorsoderzhaschei plazme”, Khimiya plazmy, 10, Energoatomizdat, M., 108–146

[15] Polak L. S., Slovetskii D. I., Fedoseeva T. V., “Relaksatsionnye issledovaniya mekhanizmov vozbuzhdeniya chastits v tleyuschem razryade v uglekislom gaze i ego smesi s argonom”, Teplofizika vysokikh temperatur, 19:6 (1981), 1135–1143

[16] Agostino R., Benedictis S., Cramarossa F., “RF Plasma Decomposition of $\mathrm{CF}_4-\mathrm{C}_2\mathrm{F}_4$ Mixtures during Silicon Etching or Fluoropolymer Deposition”, Plasma Chem. Plasma Proc., 4:1 (1984), 1–14 | DOI

[17] Smolinski G., Flamm D. L., “The Plasma Oxidation of $\mathrm{CF}_4$ in a Tubular Alumina Fast Flow Reactor”, J. Appl. Phys., 50:7 (1979), 4982–4987 | DOI

[18] Vinogradov G. K., Imanbaev G. Zh., Slovetskii D. I., “Osobennosti kinetiki polimerizatsii perftortsiklobutana v VCh razryade”, Khimiya vysokikh energii, 19:5 (1985), 455–460

[19] Gross E. W., Deutsch H., Sabadil H., “Untersuhuncren an Polymerisierenden Plasmen der Benzol-Edelgas Blimmentladiing”, Beitr. Plasma Phys. B, 15:4 (1975), 191–203 | DOI

[20] Vinogradov G. K., “Plazmennaya polimerizatsiya”, Khimiya vysokikh energii, 20:3 (1986), 195–214

[21] Agostino R., Cramarossa F., et al., “On the Use of Actinometric Emission Snectroscony $\mathrm{SF}_6-\mathrm{O}_2$ Discharges”, Plasma Chem. Plasma Proc., 5:3 (1985), 239–253 | DOI

[22] Grebowicz J., Pakula T., Wrobel A. M. Knyszewski M., “Electron Microscopy Studies of Plasma Polymerized Organosilicon Thin Filmis”, Thin Solid Films, 65:3 (1980), 351–359 | DOI

[23] Castonguay J., Theoret A., “Proprietes Electriques de Minces Films de Polymeres Formes dans une Decharge RF a Partir de Monomeres Organiques Semi-Conducteurs”, Thin Solid Films, 69:1 (1980), 85–97 | DOI

[24] Varshney S. K., Beaty C. L., “Formation of a Silicon Carbide and Nitride by Vapor-Phase reaction”, Ceram. Eng. Sci. Proc., 3:9–10 (1982), 555–564 | DOI

[25] Wrobel A. M., Wertheimer M. R., Dib J., Schreiber H. P., “Polymerization of Orgranosilicones in Microwave Discharges”, J. Macromol. Sci. A: Chem. A, 14:3 (1980), 321–337 | DOI

[26] Kay E., Levenson L. L., James W. J., Auerbach R. A., “Organotin polymers Formed by Glow Discharge Polymerization”, J. Phys. Chem., 84:12 (1980), 1365–1368

[27] Selwyn G. S., Kay E., “Spatially Resolved Optical Emission Studies of Fluorocarbon RF Plasma through the Use of UV Transmitting Optical Flbers”, Plasma Chem. Plasma Proc., 5:2 (1985), 183–199 | DOI

[28] Barnes R. M., “Inductive Coupled Plasma Spectroscopy”, Proc. 6th Int. Symp. Plasma Chem., 2, McGill University, Montreal, 1983, 419–424

[29] Migacheva L. A., Nemtseva N. G., Przhonskii A. M., “Mass-spektrometricheskoe issledovanie prodolnogo raspredeleniya komponentov plazmennogo potoka na poverkhnost v smesyakh inertnykh gazov s metanom”, Khimiya vysokikh energii, 20:4 (1986), 358–361

[30] Nemtseva N. G., Przhonskii A. M., “Sostav ionnogo potoka na polimernuyu plenku, obrazuyuschuyusya pri razryade”, Khimiya vysokikh energii, 17:3 (1983), 279–281

[31] Breitbarth F.-W., Tiller H. J., Reinhardt W., “Plasma Chemical Reactions in Weakly Decomposed $\mathrm{CCL}_4$”, Plasma Chem. Plasma Proc., 5:4 (1985), 293–316 | DOI

[32] Parkin A. A., Issledovanie protsessa plazmokhimicheskoi polimerizatsii i razrabotka metodov napravlennogo formirovaniya dielektricheskikh struktur, Dis. $\dots$ kand. tekhn. nauk, Institut kibernetiki AN USSR, Kiev, 1982

[33] Ivanov S. I., “Mass-spektrometricheskoe issledovanie polimerizatsii TFE v VCh razryade”, Khimiya vysokikh energii, 13:1 (1979), 70–74

[34] Zyn V. I., Oparin V. B., Potapov V. K. i dr., “Mass-spektrometricheskoe issledovanie kinetiki gazorazryadnykh khimicheskikh reaktsii v TFE”, Khimiya vysokikh energii, 19:4 (1985), 374–378

[35] Zyn V. I., Parkin A. A., “Mass-spektrometricheskoe issledovanie plazmokhimicheskoi polimerizatsii stirola”, 3-i Vsesoyuz. simp. “Plazmokhimiya-79”, Tez. dokl., INKhS AN SSSR, M., 1979, 185–187

[36] Kinetika polimerizatsii TFE i GFB v NCh tleyuschem razryade, Dis. $\dots$ kand. fiz.-mat. nauk, NIFKhI im. L. Ya. Karpova, M., Oparin V. B.

[37] Mach R., Drost H., “Kinetics of the Methane Conversion in a Glow Discharge up to Chemical Equilibrium”, Proc. 6th Int. Symp. Plasma Chem., V. 2, McGill Univ., Montreal, 1983, 412–417

[38] Schurov A. P., Nikolaev V. I., Kolotyrkin V. M. i dr., “Zaryad dispersnykh polimernykh chastits v tleyuschem pazpyade”, Zhvpn. fiz. khimii, 53:4 (1979), 930–934

[39] Vinogradov G. K., Imanbaev G. Zh., Polak L. S., Slovetskii D. I., “Eksperimentalnoe issledovanie obrazovaniya polimernykh plenok v neravnovesnoi ftoruglerodnoi plazme”, Khimiya vysokikh energii, 17:4 (1983), 372–377

[40] Zyn V. I., Parkin A. A., Shterenberg A. M., “Vliyanie gravitatsii na formirovanie polimernoi plenki v tleyuschem razryade”, Khimiya vysokikh energii, 17:3 (1983), 280–282

[41] Zyn V. I., “Sedimentatsionnye effekty pri gazorazryadnoi polimerizatsii”, Khim. fizika, 1:12 (1982), 1674–1680

[42] Gousbet A. A., “Review of Measurment of Particle Velocities and Diameters by Laser Techniques, with Emphasis on Thermal Plasma”, Plasma Chem. Plasma Proc., 5:2 (1985), 91–117 | DOI

[43] Celenti D., Benenson D. M., “Measurments of Velocity Within a Fully Developed Plasma”, Proc. 6th Int. Symp. Plasma Chem., no. 1, McGill Univ., Montreal, 1983, 126–131

[44] Garanin G. S., Ivanov Yu. A., Timakin V. N., “Issledovanie roli makrochastits v protsesse plazmokhimicheskoi polimerizatsii”, Khimiya vysokikh energii, 15:3 (1981), 183–184

[45] Zyn V. I., Potapov V. K., Tuzov L. S., Shterenberg A. M., “Obrazovanie, dvizhenie i kondensatsiya kremniiorganicheskikh polimernykh aerozolei v tleyuschem razryade”, Khimiya vysokikh energii, 20:6 (1986), 541–547

[46] Saksonskii V. A., Kinetika polimerizatsii ryada uglevodorodov v VCh-razryade nizkogo davleniya, Avtoref. dis. $\dots$ kand. fiz-mat. nauk, NIFKhI im. L. Ya. Karpova, M., 1985

[47] Tuzov L. S., Shterenberg A. M., Zhulanov Yu. V., “Eksperimentalnye osnovy izucheniya protsessa obrazovaniya makrochastits v tleyuschem razryade”, Zhurn. fiz. khimii, 61:3 (1987), 856–858

[48] Polak L. S., Neravnovesnaya khimicheskaya kinetika i ee primenenie, Nauka, M., 1979

[49] Kondratev V. P., Nikitin E. E., Kinetika i mekhanizm gazofaznykh reaktsii, Nauka, M., 1974

[50] Emanuel N. M., Knorre D. G., Kurs khimicheskoi kinetiki, Vyssh. shkola, M., 1969

[51] Raizer Yu. P., Fizika gazovogo razryada, Nauka, M., 1987

[52] Zyn V. I., Oparin V. B., Potapov V. K., “Kineticheskaya massspektrometriya nachalnykh stadii polimerizatsii TFE v tleyuschem razryade”, Khimiya vysokikh energii, 23:1 (1989), 75–80

[53] Brewer A. K., Westhauer J. W., “Chemical Action in the Glow Discharge. 2: Further Investigation of the Synthesis of Ammonia”, J. Phys. Chem., 34:1 (1930), 153–164 | DOI

[54] Brewer A. K., Kuech P. D., “Chemical Action in the Glow Discharge. 7: The Dissociation and Oxidation of Methane”, J. Phys. Chem., 35:10 (1931), 1293–1302 | DOI

[55] Shterenberg A. M., Kinetika ob'emnoi polimerizatsii siloksanov i silazanov v NCh tleyuschem razryade, Dis. $\dots$ kand. fiz.-mat. nauk, NIFKhI im. L. Ya. Karpova, M., 1986

[56] Gilman A. B. i dr., “O polimerizatsii nekotorykh poliftorirovannykh aromaticheskikh soedinenii v tleyuschem razryade”, Vysokomolekulyarnye soedineniya, 23A:1 (1982), 155–160 | MR

[57] Tkachuk B. V., Marusii N. Ya., Laure E. P. i dr., “Tonkie plenki politetraftoretilena”, Elektronnaya tekhnika. Ser. 7, 1974, no. 6, 77–78

[58] Tuzov L. S. i dr., “Obrazovanie polimernykh plenok iz toluola na poverkhnosti metalla pod deistviem tleyuschego razryada peremennogo toka”, Vysokomolekulyarnye soedineniya, 94:11 (1967), 2414–2421

[59] Kolotyrkin V. M., Butaev A. K., Tsapuk A. K., Tunitskii N. N., “Poluchenie tonkikh plenok iz bis-(metilallil)-bis(dimetil)- tsiklotetrasiloksana metodom elektronnoi bombardirovki”, Khimiya vysokikh energii, 3:1 (1969), 71–73

[60] Bruno O., Capezzuto P., et al., “Deposition Mechanism in (CD) $\mathrm{Si}$, $\mathrm{H}$, $\mathrm{Cl}$ Film Preparation: Kinetic Evidences”, Escampig. 84: 7th Eur. Sec. Conf. Atom. and Mol. Phys. Ioniz. Gases. Bari, 1984, 105–106

[61] Kirov K. L., et al., “Plasma Deposition of $\mathrm{Si}_3\mathrm{N}_4$ Layers”, Thin Solid Films, 71:1 (1980), 9–11 | DOI | MR

[62] G. Khass (red.), Fizika tonkikh plenok, T. 3, Mir, M., 1968

[63] Tkachuk B. V., Kolotyrkin V. M., Poluchenie tonkikh polimernykh plenok iz gazovoi fazy, Khimiya, M., 1977

[64] Yasuda X., Polimerizatsiya v plazme, Mir, M., 1988

[65] Clark D. T., Shuttleworth D., “Plasma polymerization. 2: An ESCA Investigation of Polymers Synthesized by Excitation of Inductively Coupled RF Plasma in Perfluorobenzene and Perfluorohexane”, J. Polym. Sci.: Polym. Chem., 18:1 (1980), 27–46 | DOI

[66] Yasuda H., Morosoff N., “Plasma Polymerization of TFE. 1: Inductive RF Discharge”, J. Appl. Polym. Sci., 23:4 (1979), 1003–1011 | DOI

[67] Mak Taggart F., Plazmokhimicheskie reaktsii v elektricheskikh razryadakh, Atomizdat, M., 1972

[68] Imanbaev G. Zh., Kinetika plazmokhimicheskoi polimerizatsii perftortsiklobutana, Avtoref. dis. $\dots$ kand. khim. nauk, IKhF AN SSSR, M., 1988

[69] Zyn V. I., Oparin V. B., Potapov V. K., Tuzov L. S., “Prostranstvennoe raspredelenie skorostei polimerizatsionnykh protsessov v reaktore tleyuschego razryada s TFE”, Khimiya vysokikh energii, 23:3 (1989), 276–281

[70] Berlin A. A., Volfson S. A., Enikolopyan N. S., Kinetika polimerizatsionnykh protsessov, Khimiya, M., 1978

[71] Rusanov V. D., Fridman A. A., Fizika khimicheski aktivnoi plazmy, Nauka, M., 1984