Method for measuring thickness of thin objects with a nanometer resolution, based on the single-layer flat-coil-oscillator method
Proceedings of the Yerevan State University. Physical and mathematical sciences, no. 3 (2010), pp. 63-67

Voir la notice de l'article provenant de la source Math-Net.Ru

A method for measuring of any composition films and tapes thickness with a nanometer resolution is suggested and validated experimentally. That operates on the base of a single-layer flat-coil-oscillator technique. A laboratory prototype of a device is designed and created, based on this method. Besides, PC operation in a "NI LabVIEW" software environment, as well as preliminary tests and calibration of the created device is implemented. It may find variety of applications in a research and in high-tech technology.
Keywords: single-layer Flat-Coil-Oscillator method, a nanometer resolution thickness measuring and controlling technique, high-$T_c$ superconductive films and tapes.
@article{UZERU_2010_3_a8,
     author = {S. G. Gevorgyan and S. T. Muradyan and M. H. Azaryan and G. H. Karapetyan},
     title = {Method for measuring thickness of thin objects with a nanometer resolution, based on the single-layer flat-coil-oscillator method},
     journal = {Proceedings of the Yerevan State University. Physical and mathematical sciences},
     pages = {63--67},
     publisher = {mathdoc},
     number = {3},
     year = {2010},
     language = {en},
     url = {http://geodesic.mathdoc.fr/item/UZERU_2010_3_a8/}
}
TY  - JOUR
AU  - S. G. Gevorgyan
AU  - S. T. Muradyan
AU  - M. H. Azaryan
AU  - G. H. Karapetyan
TI  - Method for measuring thickness of thin objects with a nanometer resolution, based on the single-layer flat-coil-oscillator method
JO  - Proceedings of the Yerevan State University. Physical and mathematical sciences
PY  - 2010
SP  - 63
EP  - 67
IS  - 3
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/UZERU_2010_3_a8/
LA  - en
ID  - UZERU_2010_3_a8
ER  - 
%0 Journal Article
%A S. G. Gevorgyan
%A S. T. Muradyan
%A M. H. Azaryan
%A G. H. Karapetyan
%T Method for measuring thickness of thin objects with a nanometer resolution, based on the single-layer flat-coil-oscillator method
%J Proceedings of the Yerevan State University. Physical and mathematical sciences
%D 2010
%P 63-67
%N 3
%I mathdoc
%U http://geodesic.mathdoc.fr/item/UZERU_2010_3_a8/
%G en
%F UZERU_2010_3_a8
S. G. Gevorgyan; S. T. Muradyan; M. H. Azaryan; G. H. Karapetyan. Method for measuring thickness of thin objects with a nanometer resolution, based on the single-layer flat-coil-oscillator method. Proceedings of the Yerevan State University. Physical and mathematical sciences, no. 3 (2010), pp. 63-67. http://geodesic.mathdoc.fr/item/UZERU_2010_3_a8/