Geodesic
Method for measuring thickness of thin objects with a nanometer resolution, based on the single-layer flat-coil-oscillator method
Proceedings of the Yerevan State University. Physical and mathematical sciences, no. 3 (2010), pp. 63-67.

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A method for measuring of any composition films and tapes thickness with a nanometer resolution is suggested and validated experimentally. That operates on the base of a single-layer flat-coil-oscillator technique. A laboratory prototype of a device is designed and created, based on this method. Besides, PC operation in a "NI LabVIEW" software environment, as well as preliminary tests and calibration of the created device is implemented. It may find variety of applications in a research and in high-tech technology.
Keywords: single-layer Flat-Coil-Oscillator method, a nanometer resolution thickness measuring and controlling technique, high-$T_c$ superconductive films and tapes. 
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     title = {Method for measuring thickness of thin objects with a nanometer resolution, based on the single-layer flat-coil-oscillator method},
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S. G. Gevorgyan; S. T. Muradyan; M. H. Azaryan; G. H. Karapetyan. Method for measuring thickness of thin objects with a nanometer resolution, based on the single-layer flat-coil-oscillator method. Proceedings of the Yerevan State University. Physical and mathematical sciences, no. 3 (2010), pp. 63-67. http://geodesic.mathdoc.fr/item/UZERU_2010_3_a8/

[1] D.A. Cole, J.R. Shallenberger et al., “$\mathrm{SiO_2}$ thickness determination by $X$-ray photoelectron spectroscopy, Auger electron spectroscopy, secondary ion mass spectrometry, Rutherford backscattering, transmission electron microscopy, and ellipsometry”, J. Vacuum Science $\$ Technol. B, 18 (2000), 440–444 | DOI

[2] A. Franquet, J. De Laet, T. Schram et al., “Determination of the thickness of thin silane films on aluminium surfaces by means of spectroscopic ellipsometry”, Thin Solid Films, 384:1 (2001), 37–45 | DOI

[3] V.A. Bikov, Topical review on Probe Microscopes, Doctoral Degree Dissertation RF, M., 2000 (in Russian)

[4] G. Binning, H. Rohrer, Scanning Tunneling Microscope, U.S. Patent 4343993. Aug. 10, 1982, 1982

[5] G. Binning et al., “Tunneling through a controllable vacuum gap”, Appl. Phys. Lett., 40 (1982), 178–180 | DOI

[6] R. Binning ,C. Quate et al., “Atomic Force Microscope”, Phys. Rev. Lett., 56 (1986), 930 | DOI

[7] S. Gevorgyan, T. Kiss, A. Movsisyan, H. Shirinyan, Y. Hanayama, H. Katsube, T. Ohyama, M. Takeo, T. Matsushita, K. Funaki, “Highly sensitive open-flat coil magnetometer for the $\lambda(H,T)$ measurements in plate-like high-$T_c$ cuprates”, Rev. Sci. Instr., 71:3 (2000), 1488–1994. | DOI

[8] S.G. Gevorgyan, T. Kiss, T. Ohyama, A. Movsisyan, H. Shirinyan, V.S. Gevorgyan, T. Matsushita, M. Takeo, K. Funaki, “Calibration of the open-flat coil-based tunnel diode oscillator technique (OFC magnetometer) for quantitative extraction of physical characteristics of superconductive state”, Physica C: Supercond. $\$ Appl., 366:1 (2001), 6–12 | DOI