Optimization of laser polishing of quartz glass using the method of planning computational experiments
Problemy fiziki, matematiki i tehniki, no. 2 (2022), pp. 26-30 Cet article a éte moissonné depuis la source Math-Net.Ru

Voir la notice de l'article

In this work, using the method of full factorial experiment and the method of enumeration of parameters, the process of laser polishing of quartz glass is optimized. As a result of finite element modeling, the modes of laser polishing of quartz glass using a CO$_2$ laser were determined. These modes provide the specified temperatures in the treatment zone at the minimum values of thermoelastic stresses in quartz plates.
Keywords: laser polishing, quartz plate, ANSYS.
@article{PFMT_2022_2_a4,
     author = {V. A. Emelyanov and E. B. Shershnev and Yu. V. Nikitjuk and S. I. Sokolov and I. Y. Aushev},
     title = {Optimization of laser polishing of quartz glass using the method of planning computational experiments},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {26--30},
     year = {2022},
     number = {2},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2022_2_a4/}
}
TY  - JOUR
AU  - V. A. Emelyanov
AU  - E. B. Shershnev
AU  - Yu. V. Nikitjuk
AU  - S. I. Sokolov
AU  - I. Y. Aushev
TI  - Optimization of laser polishing of quartz glass using the method of planning computational experiments
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2022
SP  - 26
EP  - 30
IS  - 2
UR  - http://geodesic.mathdoc.fr/item/PFMT_2022_2_a4/
LA  - ru
ID  - PFMT_2022_2_a4
ER  - 
%0 Journal Article
%A V. A. Emelyanov
%A E. B. Shershnev
%A Yu. V. Nikitjuk
%A S. I. Sokolov
%A I. Y. Aushev
%T Optimization of laser polishing of quartz glass using the method of planning computational experiments
%J Problemy fiziki, matematiki i tehniki
%D 2022
%P 26-30
%N 2
%U http://geodesic.mathdoc.fr/item/PFMT_2022_2_a4/
%G ru
%F PFMT_2022_2_a4
V. A. Emelyanov; E. B. Shershnev; Yu. V. Nikitjuk; S. I. Sokolov; I. Y. Aushev. Optimization of laser polishing of quartz glass using the method of planning computational experiments. Problemy fiziki, matematiki i tehniki, no. 2 (2022), pp. 26-30. http://geodesic.mathdoc.fr/item/PFMT_2022_2_a4/

[1] V.I. Arbuzov, Osnovy radiatsionnogo opticheskogo materialovedeniya, SPb GU ITMO, SPb, 2008, 284 pp.

[2] D. Wang, F. Fan, M. Liu, T. Tan, H. Li, Y. Li, “Top-hat and Gaussian laser beam smoothing of ground fused silica surface”, Optics Laser Technology, 127 (2020), 106141 | DOI

[3] V.K. Sysoev, “Laser etching and polishing of quartz tubes”, Glass and Ceramics, 60 (2003), 106–107 | DOI

[4] J. Hildebrand et al., “Laser Beam Polishing of Quartz Glass Surfaces”, Physics Procedia, 12 (2011), 452–461 | DOI

[5] J. Hildebrand et al., “Advanced analysis of laser beam polishing of quartz glass surfaces”, Physics Procedia, 39 (2012), 277–285 | DOI

[6] V.E. Borisovskii, Razvitie teorii i razrabotka kompleksa tekhnologii i oborudovaniya dlya lazernoi obrabotki kvartsevogo stekla, dis. dokt. tekhn. nauk: 05.11.14, MGUPI, M., 2011, 182 pp.

[7] E.B. Shershnev, Yu.V. Nikityuk, A.E. Shershnev, S.I. Sokolov, “Issledovanie protsessa lazernoi polirovki kvartsevogo stekla”, Problemy fiziki, matematiki i tekhniki, 2015, no. 4 (25), 45–49

[8] E.B. Shershnev, Yu.V. Nikityuk, A.E. Shershnev, S.I. Sokolov, “Issledovanie lazernogo makro- i mikroformoobrazovaniya khrupkikh nemetallicheskikh materialov metodom polnogo faktornogo eksperimenta”, Problemy fiziki, matematiki i tekhniki, 2017, no. 4 (33), 30–32

[9] A.P. Dostanko i dr., Innovatsionnye tekhnologii i oborudovanie submikronnoi elektroniki, A. P. Dostanko, Belaruskaya navuka, Minsk, 2020, 260 pp.

[10] Yu.G. Agalakov, A.V. Bernshtein, “Sokraschenie razmernosti dannykh v zadachakh imitatsionnogo modelirovaniya”, Informatsionnye tekhnologii i vychislitelnye sistemy, 2012, no. 3, 3–17

[11] A.P. Morgunov, I.V. Revina, Planirovanie i analiz rezultatov eksperimenta, ucheb. posobie, Minobrnauki Rossii, OmGTU, Izd-vo OmGTU, Omsk, 2014, 343 pp.

[12] Yu.P. Adler, E.V. Markova, Yu.V. Granovskii, Planirovanie eksperimenta pri poiske optimalnykh uslovii, Nauka, M., 1976, 278 pp.

[13] Ofitsialnyi sait kompanii ANSYS, (Data dostupa: 04.05.2022) https://www.ansys.com

[14] A.B. Kaplun, E.M. Morozov, M.A. Olfereva, ANSYS v rukakh inzhenera, prakticheskoe rukovodstvo, Editorial URSS, M., 2003, 272 pp.

[15] A.V. Chigarev, A.S. Kravchuk, A.F. Smalyuk, ANSYS dlya inzhenerov, spravochnoe posobie, Mashinostroenie, M., 2004, 512 pp.

[16] A.S. Shalumov i dr., Vvedenie v ANSYS: prochnostnoi i teplovoi analiz, uchebnoe posobie, KGTA, Kovrov, 2002, 52 pp.

[17] L.D. Kovalenko, Osnovy termouprugosti, Naukova dumka, Kiev, 1970, 307 pp.

[18] F. Gill, W. Murray, M. Wright, Practical optimization, Mir, M., 1985, 383 pp. | MR