Geodesic
Optimization of laser polishing of quartz glass using the method of planning computational experiments
Problemy fiziki, matematiki i tehniki, no. 2 (2022), pp. 26-30

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In this work, using the method of full factorial experiment and the method of enumeration of parameters, the process of laser polishing of quartz glass is optimized. As a result of finite element modeling, the modes of laser polishing of quartz glass using a CO$_2$ laser were determined. These modes provide the specified temperatures in the treatment zone at the minimum values of thermoelastic stresses in quartz plates.
Keywords: laser polishing, quartz plate, ANSYS. 
@article{PFMT_2022_2_a4,
     author = {V. A. Emelyanov and E. B. Shershnev and Yu. V. Nikitjuk and S. I. Sokolov and I. Y. Aushev},
     title = {Optimization of laser polishing of quartz glass using the method of planning computational experiments},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {26--30},
     publisher = {mathdoc},
     number = {2},
     year = {2022},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2022_2_a4/}
}
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V. A. Emelyanov; E. B. Shershnev; Yu. V. Nikitjuk; S. I. Sokolov; I. Y. Aushev. Optimization of laser polishing of quartz glass using the method of planning computational experiments. Problemy fiziki, matematiki i tehniki, no. 2 (2022), pp. 26-30. http://geodesic.mathdoc.fr/item/PFMT_2022_2_a4/