Electrophysical properties of dielectric sol-gel coatings based on silica dioxide
Problemy fiziki, matematiki i tehniki, no. 2 (2022), pp. 12-17.

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The compositions have been determined and a series of film-forming solutions has been prepared to study the effect of the methyltriethoxysilane concentration in tetraethylorthosilicate-based solutions on the electrical properties. The optimal modes of deposition and heat treatment of film-forming solutions for the synthesis of dielectric sol-gel coatings have been selected experimentally. The viscosity of the resulting solutions has been studied using a capillary viscometer. The studies of cleavage were carried out using a scanning electron microscope to analyze the thickness and homogeneity of the structure of the obtained materials. The capacitance-voltage and current-voltage dependences have been established. The calculations of the dielectric constant, the value of the voltage shift of the flat zones and the capacitance of the flat zones have been performed.
Keywords: film-forming solution, sol-gel, heat treatment, coating thickness according to SEM cleavage, capacitance-voltage characteristics, leakage current
Mots-clés : dielectric constant.
@article{PFMT_2022_2_a1,
     author = {V. V. Vaskevich and D. L. Kovalenko and V. E. Gaishun and V. V. Sidski and Ya. A. Kosenok and D. V. Zhyhulin},
     title = {Electrophysical properties of dielectric sol-gel coatings based on silica dioxide},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {12--17},
     publisher = {mathdoc},
     number = {2},
     year = {2022},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2022_2_a1/}
}
TY  - JOUR
AU  - V. V. Vaskevich
AU  - D. L. Kovalenko
AU  - V. E. Gaishun
AU  - V. V. Sidski
AU  - Ya. A. Kosenok
AU  - D. V. Zhyhulin
TI  - Electrophysical properties of dielectric sol-gel coatings based on silica dioxide
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2022
SP  - 12
EP  - 17
IS  - 2
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2022_2_a1/
LA  - ru
ID  - PFMT_2022_2_a1
ER  - 
%0 Journal Article
%A V. V. Vaskevich
%A D. L. Kovalenko
%A V. E. Gaishun
%A V. V. Sidski
%A Ya. A. Kosenok
%A D. V. Zhyhulin
%T Electrophysical properties of dielectric sol-gel coatings based on silica dioxide
%J Problemy fiziki, matematiki i tehniki
%D 2022
%P 12-17
%N 2
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2022_2_a1/
%G ru
%F PFMT_2022_2_a1
V. V. Vaskevich; D. L. Kovalenko; V. E. Gaishun; V. V. Sidski; Ya. A. Kosenok; D. V. Zhyhulin. Electrophysical properties of dielectric sol-gel coatings based on silica dioxide. Problemy fiziki, matematiki i tehniki, no. 2 (2022), pp. 12-17. http://geodesic.mathdoc.fr/item/PFMT_2022_2_a1/

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