Geodesic
The effect of plasma treatment of coatings based on organosilicon polymers deposited by electron beam dispersion on their structure and morphology
Problemy fiziki, matematiki i tehniki, no. 1 (2021), pp. 38-43.

Voir la notice de l'article provenant de la source Math-Net.Ru

Changes in the composition, molecular structure and morphology of organosilicon coatings and composite layers based on organosilicon and high-molecular fluorocarbon compounds during their plasma treatment were determined by XPS, IR spectroscopy, and AFM microscopy.The plasma treatment of coatings causes destruction of Si – C bonds, elimination of hydrocarbon fragments and the formation of oxygen-containing groups, SiO$_2$-like structures, and an increase in the roughness of surface layers is shown. The destruction of the fluorocarbon component occurs during the plasma treatment of the composite coating. An increase in the mass fraction of PTFE in the initial target is not accompanied by a monotonic decrease in the surface energy of the deposited coating.
Keywords: organosilicon coatings, plasma treatment, molecular structure, adsorption properties, morphology. 
@article{PFMT_2021_1_a5,
     author = {M. A. Yarmolenko and O. A. Sarkisov and Liu Yiming and A. V. Rogachev},
     title = {The effect of plasma treatment of coatings based on organosilicon polymers deposited by electron beam dispersion on their structure and morphology},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {38--43},
     publisher = {mathdoc},
     number = {1},
     year = {2021},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2021_1_a5/}
}
TY  - JOUR
AU  - M. A. Yarmolenko
AU  - O. A. Sarkisov
AU  - Liu Yiming
AU  - A. V. Rogachev
TI  - The effect of plasma treatment of coatings based on organosilicon polymers deposited by electron beam dispersion on their structure and morphology
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2021
SP  - 38
EP  - 43
IS  - 1
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2021_1_a5/
LA  - ru
ID  - PFMT_2021_1_a5
ER  - 
%0 Journal Article
%A M. A. Yarmolenko
%A O. A. Sarkisov
%A Liu Yiming
%A A. V. Rogachev
%T The effect of plasma treatment of coatings based on organosilicon polymers deposited by electron beam dispersion on their structure and morphology
%J Problemy fiziki, matematiki i tehniki
%D 2021
%P 38-43
%N 1
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2021_1_a5/
%G ru
%F PFMT_2021_1_a5
M. A. Yarmolenko; O. A. Sarkisov; Liu Yiming; A. V. Rogachev. The effect of plasma treatment of coatings based on organosilicon polymers deposited by electron beam dispersion on their structure and morphology. Problemy fiziki, matematiki i tehniki, no. 1 (2021), pp. 38-43. http://geodesic.mathdoc.fr/item/PFMT_2021_1_a5/

[1] R.G. Jones, W. Ando, J. Chojnowski, Silicon-Containing Polymers. The Science and Technology of their Synthesis and Applications, Kluwer Academic Publishers, London, 2000, 768 pp.

[2] S. Sapieha et al., “Deposition of Organosilicone Plasma Polymer onto Cellulose Networks”, Plasma Chemistry and Plasma Processing, 9 (1989), 225–234 | DOI

[3] J.M. Shaw et al., “Organosilicon Polymers for Lithographic Applications”, Polymer engineering and science, 23 (1983), 1054–1058 | DOI

[4] P.K. Tien, G. Smolinsky, R.J. Martin, “Thin Organosilicon Films for Integrated Optics”, Applied Optics, 11 (1972), 637–642 | DOI

[5] F. Fracassi et al., “Application of plasma deposited organosilicon thin films for the corrosion protection of metals”, Surface and Coatings Technology, 174–175 (2003), 107–111 | DOI

[6] M.A. Yarmolenko, A.A. Rogachev, P.A. Luchnikov, A.V. Rogachev, Syan Khun Dzhang, Mikro- i nanokompozitsionnye polimernye pokrytiya, osazhdaemye ikh aktivnoi gazovoi fazy, Radiotekhnika, M., 2016, 424 pp. | MR

[7] A.A. Rogachev, Fiziko-khimiya polimernykh pokrytii, osazhdennykh iz aktivnoi gazovoi fazy, Nauchnyi mir, M., 2014, 287 pp.

[8] M.A. Yarmolenko, A.A. Rogachev, A.V. Rogachev, “Vliyanie tekhnologicheskikh rezhimov formirovaniya na strukturu i svoistva pokrytii na osnove polimerov, osazhdaemykh iz aktivnoi gazovoi fazy (obzor). 1. Vliyanie uslovii i rezhimov generatsii aktivnoi gazovoi fazy”, Problemy fiziki, matematiki i tekhniki, 2016, no. 2 (27), 29–38