Geodesic
Dielectric sol-gel coatings based on silica dioxide for surface planarization of integral microcircuits
Problemy fiziki, matematiki i tehniki, no. 4 (2020), pp. 7-14.

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The conditions for the formation of sol-gel coatings for surface planarization were investigated depending on the composition of the film-forming solution. The optimal modes of applying a film-forming solution by spin-coating method were determined. The modes of heat treatment of the obtained coatings have been selected experimentally, and the effect of heat treatment on the thickness and continuity of the formed coatings has been established. By the methods of profilometry and scanning probe microscopy the roughness and planarization of the surface of the aluminum metallization of an integrated circuit using the obtained sol-gel coatings have been studied. To analyze the homogeneity of the layer structures of the deposited sol-gel coatings, studies of planarity and thickness were carried out using a scanning electron microscope.
Keywords: film-forming solution, sol-gel, heat treatment, coating thickness, planarization.
Mots-clés : profilogram 
@article{PFMT_2020_4_a0,
     author = {V. V. Vaskevich and V. E. Gaishun and D. L. Kovalenko and Sungwook Mhin and M. I. Moskvichyov and A. N. Petlitskiy and D. V. Zhyhulin},
     title = {Dielectric sol-gel coatings based on silica dioxide for surface planarization of integral microcircuits},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {7--14},
     publisher = {mathdoc},
     number = {4},
     year = {2020},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2020_4_a0/}
}
TY  - JOUR
AU  - V. V. Vaskevich
AU  - V. E. Gaishun
AU  - D. L. Kovalenko
AU  - Sungwook Mhin
AU  - M. I. Moskvichyov
AU  - A. N. Petlitskiy
AU  - D. V. Zhyhulin
TI  - Dielectric sol-gel coatings based on silica dioxide for surface planarization of integral microcircuits
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2020
SP  - 7
EP  - 14
IS  - 4
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2020_4_a0/
LA  - ru
ID  - PFMT_2020_4_a0
ER  - 
%0 Journal Article
%A V. V. Vaskevich
%A V. E. Gaishun
%A D. L. Kovalenko
%A Sungwook Mhin
%A M. I. Moskvichyov
%A A. N. Petlitskiy
%A D. V. Zhyhulin
%T Dielectric sol-gel coatings based on silica dioxide for surface planarization of integral microcircuits
%J Problemy fiziki, matematiki i tehniki
%D 2020
%P 7-14
%N 4
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2020_4_a0/
%G ru
%F PFMT_2020_4_a0
V. V. Vaskevich; V. E. Gaishun; D. L. Kovalenko; Sungwook Mhin; M. I. Moskvichyov; A. N. Petlitskiy; D. V. Zhyhulin. Dielectric sol-gel coatings based on silica dioxide for surface planarization of integral microcircuits. Problemy fiziki, matematiki i tehniki, no. 4 (2020), pp. 7-14. http://geodesic.mathdoc.fr/item/PFMT_2020_4_a0/

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