Boron-carbon coatings: methods of deposition, structure features and mechanical properties

B. Zhou ; D. G. Piliptsov ; X. Jiang ; E. A. Kulesh ; A. S. Rudenkov

Problemy fiziki, matematiki i tehniki, no. 3 (2019), pp. 7-12.

Résumé

The main methods of forming coatings based on boron and carbon are considered. The main phase States formed during the synthesis of such coatings are described. Attention is paid to the analysis of the relationship between the structure and mechanical properties. A method and device for deposition of boron-carbon coatings from combined flows of carbon plasma formed by electrospark evaporation of graphite cathode by pulsed arc and boron ions generated by evaporation of the target by pulsed laser radiation is proposed.

Détail

Keywords: carbon coatings, doped, microhardness, wear
Mots-clés : boron, coefficient of friction.

Bibliographie

[1] D. He et al., “Tailoring the mechanical and tribological properties of B$_4$C/a-C coatings by controlling the boron carbide content”, Surface and Coatings Technology, 329 (2017), 11–18 | DOI

[2] C. Donnet, “Recent progress on the technology of doped diamond-like and carbon alloy coatings”, Surface and Coatings Technology, 100–101 (1998), 180–186 | DOI

[3] B. Kleinsorge et al., “Influence of nitrogen and temperature on the deposition of tetrahedrally bonded amorphous carbon”, Journal of Applied Physics, 88 (2000), 1149 | DOI

[4] B. Podgornik, D. Hren, J. Vizintin, “Low-friction behavior of boundary-lubricated diamond-like carbon coatings containing tungsten”, Thin Solid Films, 476:1 (2005), 92–100 | DOI

[5] P.D. Cuong et al., “Effects of relative humidity on tribological properties of boron carbide coating against steel”, Surface and Coatings Technology, 201 (2006), 4230–4235 | DOI

[6] R.H. Wentorf, “Synthesis of the Cubic Form of Boron Nitride”, The Journal of Chemical Physics, 34 (1961), 809 | DOI

[7] V.L. Solozhenko et al., “Synthesis of superhard cubic BC$_2$N”, Applied Physics Letters, 78 (2001), 1385–1387 | DOI

[8] H. Ito, K. Hori, H. Saitoh, “Deposition of mechanically hard amorphous carbon nitride films from decomposition of BrCN. Effects of substrate cooling and pulsed rf-bias voltage”, Journal of Non-Crystalline Solids, 352:1 (2006), 1–7 | DOI

[9] Nakazawa H. et al., “Mechanical and tribological properties of boron, nitrogen-coincorporated diamond like carbon films prepared by reactive radio-frequency magnetron sputtering”, Diamond and Related Materials, 19 (2010), 503–506 | DOI

[10] X. Qiao et al., “Effects of B(CH$_3$O)$_3$ content on a PACVD plasma-boriding process”, Surface and Coatings Technology, 131 (2000), 291–293 | DOI

[11] B. Cordero et al., “Covalent radii revisited”, Dalton Transactions, 21 (2008), 2832–2838 | DOI

[12] H. Chin, S. Yoshida, S. Watanabe, “Tribological behavior of binary B-C films deposited by sputtering-PBII hybrid system”, Materials Sciences and Applications, 9 (2018), 723–731 | DOI

[13] M. Herrmann, B. Matthey, T. Gestrich, “Boron-doped diamond with improved oxidation resistance”, Diamond and Related Materials, 92 (2019), 47–52 | DOI

[14] E.N. Shubina i dr., “Vliyanie dobavleniya diborana na svoistva plazmokhimicheski osazhdaemykh uglerodnykh plenok”, Pisma v ZhTF, 43:1 (2017), 80–88 | MR

[15] C.S. Park et al., “Effect of boron and silicon doping on the surface and electrical properties of diamond like carbon films by magnetron sputtering technique”, Surface and Coatings Technology, 231 (2013), 131–134 | DOI

[16] H. Mori et al., “Low friction property of boron doped DLC under engine oil”, Tribology Online, 12:3 (2017), 135–140 | DOI

[17] N.I. Fainer i dr., “Tonkie plenki karbonitridov kremniya i bora: sintez, issledovanie sostava i struktury”, Zh. Ros. khim. ob-va im. D.I. Mendeleeva, XLV:3 (2001), 101–108

[18] B. Wang et al., “Direct and large scale electric arc discharge synthesis of boron and nitrogen doped single-walled carbon nanotubes and their electronic properties”, Carbon, 47:8 (2009), 2112–2142 | DOI

[19] O.I. Buzhinskij et al., “Plasma deposition of boron films with high growth rate and efficiency using carborane”, Journal of Nuclear Materials, 313–316 (2003), 214–218 | DOI

[20] S. Nekkanty, M.E. Walter, “Indentation damage to boron carbide-DLC coatings with different compositions”, Surface and Coating Tech., 183 (2004), 1–9 | DOI

[21] A. Sikora et al., “Structural and electrical characterization of boron containing diamond-like carbon films deposited by femtosecond pulsed laser ablation”, Solid State Sci., 11 (2009), 1738–1741 | DOI

[22] S. Liza et al., “Tribological and thermal stability study of nanoporous amorphous boron carbide films prepared by pulsed plasma chemical vapor deposition”, Science and Technology of Advanced Materials, 16 (2015), 035007, 13 pp. | DOI

[23] S. Liza et al., “Deposition of boron doped DLC films on TiNb and characterization of their mechanical properties and blood compatibility”, Science and Technology of Advanced Materials, 18:1 (2017), 76–87 | DOI

[24] R. Ramesham, “Cyclic voltammetric response of boron-doped homoepitaxia Uy grown single crystal and noncrystalline CVD diamond”, Sensors and Actuators B, 50 (1998), 131–139 | DOI

[25] H. Nakazawa et al., “Synthesis of boron/nitrogen-incorporated diamondlike carbon films by pulsed laser deposition using nitrogen gas and a boron-containing graphite target”, Japanese J. of Applied Physics, 56:10 (2017), 105501, 7 pp. | DOI

[26] L.L. Zhang et al., “Synthesis and characterization of boron incorporated diamond-like carbon thin films”, Thin Solid Films, 589 (2015), 457–464 | DOI

[27] X. Blase et al., “Theory of composite B$_x$C$_y$N$_z$ nanotube heterojunctions”, Appl. Phys. Lett., 70:2 (1997), 197–199 | DOI

[28] R. Peter et al., “Formation of defects in boron nitride by low energy ion bombardment”, J. Appl. Phys., 106:8 (2009), 083523 | DOI

[29] S. Nakao et al., “Effects of nitrogen gas ratio on composition and microstructure of BCN films prepared by RF magnetron sputtering”, Vacuum, 84 (2009), 642–647 | DOI

[30] X.J. Lia et al., “Characterization of boron doped diamondlike carbon film by HRTEM”, Appl. Surf. Sci., 357 (2015), 2141–2146 | DOI

[31] D. Jana et al., “Effect of chemical doping of boron and nitrogen on the electronic, optical, and electrochemical properties of carbon nanotubes”, Chen. Prog. Mater. Sci., 58:5 (2013), 565–635 | DOI

[32] M. Chhowalla et al., “Highly tetrahedral amorphous carbon films with low stress”, Applied Physics Letters, 69 (1996), 2344 | DOI

[33] A.G. Nikolaev i dr., “Generatsiya plazmy bora v vakuumnoi duge s katodom iz geksaborida lantana”, Pisma v ZhTF, 41:18 (2015), 30–37

[34] K. Suenaga et al., “Organisation of carbon and boron nitride layers in mixed nanoparticles and nanotubes synthesized by arc discharge”, Appl. Phys. A, 68:3 (1999), 301–308 | DOI

[35] J. Han et al., “Photovoltaic characteristics of amorphous silicon solar cells using boron doped tetrahedral amorphous carbon films as p-type window materials”, Appl. Physics Lett., 90 (2007), 083508 | DOI

[36] O.V. Sedelnikova et al., “Effect of boron and nitrogen additives on structure and transport properties of arc-produced carbon”, Carbon, 143 (2019), 660–668 | DOI

[37] V.A. Krivchenko i dr., “Issledovanie polikristallicheskikh almaznykh plenok, legirovannykh borom, metodami spektroskopii ramanovskogo rasseyaniya i spektroskopii opticheskogo pogloscheniya]”, Zhurnal tekhnicheskoi fiziki, 77:11 (2007), 83–87

[38] P. Redlich et al., “B-C-N nanotubes and boron doping of carbon nanotubes”, Chem. Phys. Lett., 260 (1996), 465–470 | DOI