Laser thermosplitting of sapphire by crescent-shaped beams

S. V. Shalupaev ; Yu. V. Nikitjuk ; A. A. Sereda

Problemy fiziki, matematiki i tehniki, no. 3 (2018), pp. 49-54.

Résumé

In the framework of the thermoelasticity theory, a comparative analysis of the temperature fields and fields of thermoelastic stresses arising in the plates of crystalline sapphire in the process of single-beam and two-beam controlled laser thermosplitting is carried out using round and crescent-shaped beams. It is shown that the use of crescent-shaped beams provides the formation of tensile stresses necessary for the stable realization of the laser thermosplitting process, with a significant reduction in the maximum temperatures in the samples compared with the use of round-shaped beams.

Détail

Keywords: : thermosplitting, modeling, finite element method, temperature, single crystal, sapphire, thermoelastic stresses.

Bibliographie

[1] R.M. Lumley, “Controlled separation of brittle materials using a laser”, Am. Ceram. Soc. Bull., 48 (1969), 850–854

[2] G.A. Machulka, Lazernaya obrabotka stekla, Sov. radio, M., 1979, 136 pp.

[3] J. Junke, W. Xinbing, “Cutting glass substrates with duallaser beams”, Optics and Lasers in Engineering, 47 (2009), 860–864 | DOI

[4] C. Zhao, H. Zhang, Y. Wang, “Semiconductor laser asymmetry cutting glass with laser induced thermal-crack propagation”, Optics and Lasers in Engineering, 63 (2014), 43–52 | DOI

[5] V.S. Kondratenko, A.S. Naumov, “Razvitie metoda lazernogo upravlyaemogo termoraskalyvaniya”, Vestnik MGTU MIREA, 2:3 (2015), 1–11

[6] A.G. Grigoryants, I.N. Shiganov, A.I. Misyurov, Tekhnologicheskie protsessy lazernoi obrabotki, ucheb. posobie, ed. A.G. Grigoryants, Izd-vo MGTU im. N.E. Baumana, M., 2006, 664 pp.

[7] I.E. Malov, “Issledovanie primenimosti tekhnologii lazernogo upravlyaemogo termoraskalyvaniya dlya izgotovleniya elementov termoopticheskogo pokrytiya radiatorov kosmicheskikh apparatov”, Naukoemkie tekhnologii v mashinostroenii, 2017, no. 12, 36–39

[8] S.V. Shalupaev i dr., “Pretsizionnaya lazernaya obrabotka khrupkikh nemetallicheskikh materialov”, Izvestiya Gomelskogo gosudarstvennogo universiteta im. F. Skoriny, 2005, no. 3 (30), 87–92

[9] S.V. Shalupaev i dr., “Dvukhluchevoe lazernoe teromraskalyvanie khrupkikh nemetallicheskikh materialov”, Opticheskii zhurnal, 73:5 (2006), 62–66

[10] S.V. Shalupaev et al., “The analysis of laser thermosplitting of materials by using of special geometry beams”, Archives of metallurgy and materials, 56:4 (2011), 1149–1155 | DOI

[11] A.N. Serdyukov i dr., “Issledovanie protsessa lazernogo raskalyvaniya kremnievykh plastin, vyrezannykh v ploskosti (110)”, Problemy fiziki, matematiki i tekhniki, 2012, no. 3 (12), 37–40

[12] V.S. Kondratenko, Sposob rezki nemetallicheskikh materialov, pat. 2024441 Ros. Federatsiya, MPK5 C 03 B 33/02 #5030537/33, data publ. 15.12.94

[13] C.-H. Tsai, H.-W. Chen, “Laser cutting of thick ceramic substrates by controlled fracture technique”, Journal of materials processing technology, 136 (2003), 166–173 | DOI

[14] V.K. Sysoev, P.A. Vyatlev, “Tekhnologicheskie kharakteristiki protsessa lazernogo termoraskalyvaniya”, Izvestiya VUZov. Priborostroenie, 51:4 (2008), 48–50

[15] A.V. Sorokin, Razrabotka tekhnologicheskogo protsessa lazernogo parallelnogo termoraskalyvaniya khrupkikh materialov, Dis. ... kand. tekhn. nauk: 05.11.14, M., 2011, 148 pp.

[16] Yu.V. Klunnikova, S.P. Malyukov, A.V. Saenko, “Lazernoe upravlyaemoe termoraskalyvanie sapfira”, Izvestiya SPbGETU «LETI», 2015, no. 9, 6–10

[17] T. Kh. Bui, Razrabotka i issledovanie chuvstvitelnykh elementov datchikov davleniya na osnove struktur «kremnii na sapfire» s ispolzovaniem lazernykh tekhnologii, Dis. ... kand. tekhn. nauk: 05.27.01, Taganrog, 2016, 127 pp.

[18] S.P. Malyukov i dr., “Modelirovanie temperaturnykh polei i vnutrennikh napryazhenii v plastine sapfira pri lazernoi obrabotke”, Fizika i khimiya obrabotki materialov, 2016, no. 5, 11–16

[19] S.V. Shalupaev et al., “Modeling of mechanical influence of double-beam laser on single-crystalline silicon”, Archives of metallurgy and materials, 58:4 (2013), 1381–1385 | DOI

[20] S.V. Shalupaev, Yu.V. Nikityuk, A.A. Sereda, “Osobennosti protsessa lazernogo termoraskalyvaniya kristallov s kubicheskoi granetsentrirovannoi kristallicheskoi reshetkoi tipa almaza”, IV Mezhdunarodnaya nauchnaya konferentsiya «Problemy vzaimodeistviya izlucheniya s veschestvom», posvyaschennaya 90-letiyu so dnya rozhdeniya B. V. Bokutya, v 2 ch. (Gomel, 9–11 noyabrya 2016 g.), v. 2, GGU im. F. Skoriny, Gomel, 2016, 188–192

[21] S.V. Shalupaev, Yu.V. Nikityuk, A.A. Sereda, “Modelirovanie protsessa upravlyaemogo lazernogo termoraskalyvaniya sapfira”, Izvestiya Gomelskogo gosudarstvennogo universiteta im. F. Skoriny, 2017, no. 6 (105), 158–164

[22] Sapfir, , Ofitsialnyi sait OOO «TIDEKS» (Data dostupa: 10.07.2018) http://www.tydexoptics.com/pdf/ru/Sapphire.pdf

[23] Leikosapfir (Al2O3). Optika iz sapfira: linzy, zaschitnye okna, mikrooptika iz leikosapfira, , Ofitsialnyi sait kompanii OOO Alkor Teknolodzhiz (Data dostupa: 10.07.2018) http://www.alkor.net/alkorru/Sapphire1.html

[24] N.N. Shabrov, Metod konechnykh elementov v raschetakh detalei teplovykh dvigatelei, Mashinostroenie, L., 1983, 212 pp.

[25] G.P. Karzov, B.Z. Margolin, V.A. Shevtsova, Fiziko-mekhanicheskoe modelirovanie protsessov razrusheniya, Politekhnika, SPb., 1993, 391 pp.

[26] D. G. Harris, Does anyone out there know the strength of sapphire?, (Date of access: 27.02.2017) http://oai.dtic.mil/oai/oai?verb=getRecord&metadataPrefix=html&identifier=ADA421203

[27] T. Vodenitcharova et al., “The effect of anisotropy on the deformation and fracture of sapphire wafers subjected to thermal shocks”, Journal of Materials Processing Technology, 194 (2007), 52–62 | DOI