Geodesic
Analytical solution of the inverse problem of a spectrophotometer absorbing layer on an absorbing substrate with a dielectric layer
Problemy fiziki, matematiki i tehniki, no. 3 (2015), pp. 33-37.

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On the example of a two-layer structure of a semiconductor–insulator–semiconductor the possibility of an analytical determination of the optical parameters and thickness of the upper layer on the reflection spectrum envelope at normal incidence of light is considered. It is very difficult to calculate these functions even in the case of absence of the transition zones between the layers. Mismatching envelopes calculated and measured reflection coefficients in certain areas of the spectra indicates the presence of inhomogeneous surface and transition zones in real structures $\mathrm{рSi}$–$\mathrm{SiO}_2$–$\mathrm{cSi}$.
Keywords: bilayer structure, optical spectra, envelopes extrema, transition layers, $\mathrm{рSi}$–$\mathrm{SiO}_2$–$\mathrm{cSi}$. 
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N. I. Staskov; S. O. Parashkov; A. V. Shylov; N. A. Krekoten. Analytical solution of the inverse problem of a spectrophotometer absorbing layer on an absorbing substrate with a dielectric layer. Problemy fiziki, matematiki i tehniki, no. 3 (2015), pp. 33-37. http://geodesic.mathdoc.fr/item/PFMT_2015_3_a5/

[1] V. V. Filippov, “Analiticheskii metod opredeleniya opticheskikh postoyannykh i tolschiny pogloschayuschikh plenok po spektram otrazheniya”, Optika i spektroskopiya, 78:5 (1995), 798–801

[2] D. Minkov, “Computation of the optical constants of a thin dielectric layer on a transmitting substrate from the reflection spectrum it inclined incidence of light”, JOSA A, 8:2 (1991), 306–310 | DOI

[3] B. M. Komrakov, B. A. Shapochkin, Izmerenie parametrov opticheskikh pokrytii, Mashinostroenie, M., 1986, 136 pp.

[4] P. S. Kosobutskii, “Analiticheskie funktsii ogibayuschikh spektrov Fabri–Pero mnogosloinykh struktur”, Pisma v ZhTF, 34:10 (2008), 79–82

[5] V. V. Filippov, “Metod ogibayuschikh dlya issledovaniya sistemy dvukh plenok na otrazhayuschei podlozhke”, Optika i spektroskopiya, 101:3 (2006), 485–489

[6] M. Born, E. Volf, Osnovy optiki, per. s angl., Nauka, M., 1970, 856 pp.

[7] N. I. Staskov, I. V. Ivashkevich, N. A. Krekoten, “Ellipsometriya perekhodnykh sloev poluprovodnik-dielektrik”, Problemy fiziki, matematiki i tekhniki, 2013, no. 2(15), 18–24

[8] A. I. Belyaeva, A. A. Galuza, S. N. Kolomiets, “Granitsy razdela sloev i sherokhovatost v mnogosloinoi kremnievoi strukture”, Fizika i tekhnika poluprovodnikov, 38:9 (2004), 1050–1055

[9] N. I. Staskov, I. V. Ivashkevich, “Modelirovanie perekhodnykh sloev v strukture poluprovodnik-dielektrik-poluprovodnik”, Optika neodnorodnykh struktur, Materialy III mezhdunar. nauch.-prakt. konf. (Mogilev, 2011 g.), ed. V. A. Karpenko, MGU im. A. A. Kuleshova, Mogilev, 2011, 92–94