Geodesic
The account of influence of the natural surface layer under investigation of silicon plates by the method
Problemy fiziki, matematiki i tehniki, no. 1 (2012), pp. 26-30

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The possibility of exclusion of the influence of a natural surface layer is investigated at determination by the method of spectral ellipsometry dependencies $n(\lambda)$ and $k(\lambda)$ for a semiconductor substrate. It is shown that in the solution of the inverse ellipsometric problems a simple model of the transition layer with a single parameter which is determined by the thickness and refractive index of the layer can be used.
Keywords: spectral ellipsometry, surface layer, optical model, dispersion of optical characteristics. 
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     author = {N. I. Stas{\textquoteright}kov and I. V. Ivashkevich and A. B. Sotski and L. I. Sotskaya},
     title = {The account of influence of the natural surface layer under investigation of silicon plates by the method},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {26--30},
     publisher = {mathdoc},
     number = {1},
     year = {2012},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2012_1_a4/}
}
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N. I. Stas’kov; I. V. Ivashkevich; A. B. Sotski; L. I. Sotskaya. The account of influence of the natural surface layer under investigation of silicon plates by the method. Problemy fiziki, matematiki i tehniki, no. 1 (2012), pp. 26-30. http://geodesic.mathdoc.fr/item/PFMT_2012_1_a4/