Synthesis of heterostructures SiO$_2$/ZnO/Si by sol-gel method
Problemy fiziki, matematiki i tehniki, no. 3 (2011), pp. 24-27.

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The analysis of voltage-current and voltage-farad characteristic of SiO$_2$/ZnO/Si-structures are described. SiO$_2$/ZnO/Si structures are synthesized by sol-gel metrod with using of zinc nitrate, chloride and acetate as initials. The defects density on the ZnO/Si boundary by Mott-Shottky relationship С$_2$(U) is calculated. The main conductivity mechanism (space-charge limited current) is determined. It is shown that sol-gel films synthesized from zinc acetate have good photosensitivity.
Keywords: sol-gel, ZnO, voltage-current and voltage-farad characteristic.
@article{PFMT_2011_3_a3,
     author = {V. V. Malyutina-Bronskaya and {\CYRA}. {\CYRM}. Polikanin and V. B. Zalesskiy and A. V. Semchenko and V. V. Sidsky and V. E. Gayshun},
     title = {Synthesis of heterostructures {SiO}$_2${/ZnO/Si}  by sol-gel method},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {24--27},
     publisher = {mathdoc},
     number = {3},
     year = {2011},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2011_3_a3/}
}
TY  - JOUR
AU  - V. V. Malyutina-Bronskaya
AU  - А. М. Polikanin
AU  - V. B. Zalesskiy
AU  - A. V. Semchenko
AU  - V. V. Sidsky
AU  - V. E. Gayshun
TI  - Synthesis of heterostructures SiO$_2$/ZnO/Si  by sol-gel method
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2011
SP  - 24
EP  - 27
IS  - 3
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2011_3_a3/
LA  - ru
ID  - PFMT_2011_3_a3
ER  - 
%0 Journal Article
%A V. V. Malyutina-Bronskaya
%A А. М. Polikanin
%A V. B. Zalesskiy
%A A. V. Semchenko
%A V. V. Sidsky
%A V. E. Gayshun
%T Synthesis of heterostructures SiO$_2$/ZnO/Si  by sol-gel method
%J Problemy fiziki, matematiki i tehniki
%D 2011
%P 24-27
%N 3
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2011_3_a3/
%G ru
%F PFMT_2011_3_a3
V. V. Malyutina-Bronskaya; А. М. Polikanin; V. B. Zalesskiy; A. V. Semchenko; V. V. Sidsky; V. E. Gayshun. Synthesis of heterostructures SiO$_2$/ZnO/Si  by sol-gel method. Problemy fiziki, matematiki i tehniki, no. 3 (2011), pp. 24-27. http://geodesic.mathdoc.fr/item/PFMT_2011_3_a3/

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