Simulation solid-state structures formation under the actions of ion fluxes
Problemy fiziki, matematiki i tehniki, no. 2 (2011), pp. 43-48.

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Two models for the process of formation of micro- and nanostructures are proposed. The differences between the two models are shown. Various forms and material parameters in the course of action are studied on the basis of mathematical models.
Keywords: formation of thin-film structures, electromagnetic effects of the plasma formation of thin-film structures, electromagnetic effects of plasma.
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I. N. Spresov. Simulation solid-state structures formation under the actions of ion fluxes. Problemy fiziki, matematiki i tehniki, no. 2 (2011), pp. 43-48. http://geodesic.mathdoc.fr/item/PFMT_2011_2_a7/

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