Geodesic
EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations
Matematičeskoe modelirovanie, Tome 25 (2013) no. 7, pp. 89-102.

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The model of nonstationary non-equilibrium radiative plasma with accounting for level kinetics and radiative transport in spectral lines is constructed. The modeling of spherical target explosion and emmision as a result of laser pulse is carried out. Numerical calculation of two-temperature 1D Lagrangian equations of gasdynamics is realized. Radiation field and level kinetics are accounted self-consistently by using two different approaches: using interpolation between precalculated tables of spectral parameters and with account of detailed level kinetics included in-line into gasdynamic calculations. The efficiency of extreme ultraviolet source based on lithium and tin laser plasma is estimated. The results have a significant value for EUV-lithography, wich is used in microchip production. Obtained efficiency of EUV-source at optimal parameters of laser pulse is $\sim1\%$ for lithium and $\sim5\%$ for tin, that is close to experimental data.
Keywords: detailed level kinetics, extreme ultraviolet, laser produced plasma, radiative gasdynamics. 
@article{MM_2013_25_7_a6,
     author = {D. A. Kim and V. G. Novikov and G. V. Dolgoleva and K. N. Koshelev and A. D. Solomyannaya},
     title = {EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {89--102},
     publisher = {mathdoc},
     volume = {25},
     number = {7},
     year = {2013},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_2013_25_7_a6/}
}
TY  - JOUR
AU  - D. A. Kim
AU  - V. G. Novikov
AU  - G. V. Dolgoleva
AU  - K. N. Koshelev
AU  - A. D. Solomyannaya
TI  - EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations
JO  - Matematičeskoe modelirovanie
PY  - 2013
SP  - 89
EP  - 102
VL  - 25
IS  - 7
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/MM_2013_25_7_a6/
LA  - ru
ID  - MM_2013_25_7_a6
ER  - 
%0 Journal Article
%A D. A. Kim
%A V. G. Novikov
%A G. V. Dolgoleva
%A K. N. Koshelev
%A A. D. Solomyannaya
%T EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations
%J Matematičeskoe modelirovanie
%D 2013
%P 89-102
%V 25
%N 7
%I mathdoc
%U http://geodesic.mathdoc.fr/item/MM_2013_25_7_a6/
%G ru
%F MM_2013_25_7_a6
D. A. Kim; V. G. Novikov; G. V. Dolgoleva; K. N. Koshelev; A. D. Solomyannaya. EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations. Matematičeskoe modelirovanie, Tome 25 (2013) no. 7, pp. 89-102. http://geodesic.mathdoc.fr/item/MM_2013_25_7_a6/

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