Geodesic
Linear measurements in scanning electron microscopy based on morphological analysis of the images
Matematičeskoe modelirovanie, Tome 15 (2003) no. 5, pp. 47-53 
E. A. Grachev; D. M. Ustinin; A. I. Chulichkov. Linear measurements in scanning electron microscopy based on morphological analysis of the images. Matematičeskoe modelirovanie, Tome 15 (2003) no. 5, pp. 47-53. http://geodesic.mathdoc.fr/item/MM_2003_15_5_a5/
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Voir la notice de l'article provenant de la source Math-Net.Ru

Problems of finding particular object on SEM video signal and measurement of its size have great importance in electron microscopy. New approach is proposed to solution of this problems based on morphological analysis of images. Method is successfully used in electron beam lithography and microscopy.

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