Geodesic
Linear measurements in scanning electron microscopy based on morphological analysis of the images
Matematičeskoe modelirovanie, Tome 15 (2003) no. 5, pp. 47-53.

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Problems of finding particular object on SEM video signal and measurement of its size have great importance in electron microscopy. New approach is proposed to solution of this problems based on morphological analysis of images. Method is successfully used in electron beam lithography and microscopy. 
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E. A. Grachev; D. M. Ustinin; A. I. Chulichkov. Linear measurements in scanning electron microscopy based on morphological analysis of the images. Matematičeskoe modelirovanie, Tome 15 (2003) no. 5, pp. 47-53. http://geodesic.mathdoc.fr/item/MM_2003_15_5_a5/

[1] Pytev Yu. P., “Morfologicheskii analiz izobrazhenii”, DAN SSSR, 269:5 (1983), 1061–1064 | MR

[2] S. Babin, S. Borisov, E. Grachev, A. Shiriaev, An advanced Monte Carlo model of electron scattering in EBL involving fast secondary and true secondary electrons, EIL-14P. Micro-and-Nano Engineering 2000. Jena, Germany. September 2000

[3] JEOL News, 35:1 (2000)