Geodesic
An estimation of electron beam current density based on ricking up curves subject to the scattering in the diaphragm
Matematičeskoe modelirovanie, Tome 15 (2003) no. 3, pp. 83-91 
E. A. Grachev; E. A. Cheremukhin; A. I. Chulichkov. An estimation of electron beam current density based on ricking up curves subject to the scattering in the diaphragm. Matematičeskoe modelirovanie, Tome 15 (2003) no. 3, pp. 83-91. http://geodesic.mathdoc.fr/item/MM_2003_15_3_a6/
@article{MM_2003_15_3_a6,
     author = {E. A. Grachev and E. A. Cheremukhin and A. I. Chulichkov},
     title = {An estimation of electron beam current density based on ricking up curves subject to the scattering in the diaphragm},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {83--91},
     year = {2003},
     volume = {15},
     number = {3},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_2003_15_3_a6/}
}
TY  - JOUR
AU  - E. A. Grachev
AU  - E. A. Cheremukhin
AU  - A. I. Chulichkov
TI  - An estimation of electron beam current density based on ricking up curves subject to the scattering in the diaphragm
JO  - Matematičeskoe modelirovanie
PY  - 2003
SP  - 83
EP  - 91
VL  - 15
IS  - 3
UR  - http://geodesic.mathdoc.fr/item/MM_2003_15_3_a6/
LA  - ru
ID  - MM_2003_15_3_a6
ER  - 
%0 Journal Article
%A E. A. Grachev
%A E. A. Cheremukhin
%A A. I. Chulichkov
%T An estimation of electron beam current density based on ricking up curves subject to the scattering in the diaphragm
%J Matematičeskoe modelirovanie
%D 2003
%P 83-91
%V 15
%N 3
%U http://geodesic.mathdoc.fr/item/MM_2003_15_3_a6/
%G ru
%F MM_2003_15_3_a6

Voir la notice de l'article provenant de la source Math-Net.Ru

Mathematical model of interaction between electron beam and an sharp edge diaphragm subject to electron scattering and absorption in the diaphragm material is considered. The model is used for an estimation of electron beam distribution of current density by a set of a ricking up curves based on computing measurement systems theory. There is shown that standard model without including scattering process cannot give satisfying estimation of beam diameter and distribution of current density.

[1] Grachev E. A., Kabanov A. N., Kafafov A. A., Stakhnevich V. V., “Izmerenie parametrov potoka izlucheniya metodom diafragm”, Optiko-mekhanicheskaya promyshlennost, 1977, no. 10

[2] Chulichkov A. I., Osnovy teorii izmeritelno-vychislitelnykh sistem sverkhvysokogo razresheniya (lineinye stokhasticheskie izmeritelno-vychislitelnye sistemy), Izd-vo TGTU, 2000

[3] Pytev Yu. P., Metody analiza i interpretatsii eksperimenta, Izd-vo MGU, M., 1990 | MR

[4] Pytev Yu. P., Matematicheskie metody interpretatsii eksperimenta, Vysshaya shkola, M., 1989

[5] Dzh. Gouldstein, Kh. Yakovits (red.), Prakticheskaya rastrovaya elektronnaya mikroskopiya, Mir, M., 1978

[6] Standard Reference Material, 2069a. NBS, 1985

[7] Babin S., Borisov S., Grachev E., Shiriaev A., An advanced Monte Carlo model of electron scattering in EBL involving fast secondary and true secondary electrons, EIL-14P. Micro-and-Nano Engineering, Jena, Germany, 2000

[8] Joy D. C., Monte Carlo Modeling for Electron Microscopy and Microanalysis, Oxford University Press, 1995 | Zbl