Matematičeskoe modelirovanie, Tome 10 (1998) no. 9, pp. 35-40
Citer cet article
E. P. Zhidkov; L. A. Sevastianov. Macroparameters of an effective distribution and of a sourse function in the mathematical model of shadowed sputtering. Matematičeskoe modelirovanie, Tome 10 (1998) no. 9, pp. 35-40. http://geodesic.mathdoc.fr/item/MM_1998_10_9_a2/
@article{MM_1998_10_9_a2,
author = {E. P. Zhidkov and L. A. Sevastianov},
title = {Macroparameters of an effective distribution and of a~sourse function in the mathematical model of shadowed sputtering},
journal = {Matemati\v{c}eskoe modelirovanie},
pages = {35--40},
year = {1998},
volume = {10},
number = {9},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/MM_1998_10_9_a2/}
}
TY - JOUR
AU - E. P. Zhidkov
AU - L. A. Sevastianov
TI - Macroparameters of an effective distribution and of a sourse function in the mathematical model of shadowed sputtering
JO - Matematičeskoe modelirovanie
PY - 1998
SP - 35
EP - 40
VL - 10
IS - 9
UR - http://geodesic.mathdoc.fr/item/MM_1998_10_9_a2/
LA - ru
ID - MM_1998_10_9_a2
ER -
%0 Journal Article
%A E. P. Zhidkov
%A L. A. Sevastianov
%T Macroparameters of an effective distribution and of a sourse function in the mathematical model of shadowed sputtering
%J Matematičeskoe modelirovanie
%D 1998
%P 35-40
%V 10
%N 9
%U http://geodesic.mathdoc.fr/item/MM_1998_10_9_a2/
%G ru
%F MM_1998_10_9_a2
The investigation is presented of an existence of the unique shadowing shields for a set of close by their characteristics and sputtering conditions effective distribution of sputtered particles and source function, so as their stability for small variations of shadowed sputtering parameters.
