Macroparameters of an effective distribution and of a sourse function in the mathematical model of shadowed sputtering
Matematičeskoe modelirovanie, Tome 10 (1998) no. 9, pp. 35-40
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The investigation is presented of an existence of the unique shadowing shields for a set of close by their characteristics and sputtering conditions effective distribution of sputtered particles and source function, so as their stability for small variations of shadowed sputtering parameters.
@article{MM_1998_10_9_a2,
author = {E. P. Zhidkov and L. A. Sevastianov},
title = {Macroparameters of an effective distribution and of a~sourse function in the mathematical model of shadowed sputtering},
journal = {Matemati\v{c}eskoe modelirovanie},
pages = {35--40},
year = {1998},
volume = {10},
number = {9},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/MM_1998_10_9_a2/}
}
TY - JOUR AU - E. P. Zhidkov AU - L. A. Sevastianov TI - Macroparameters of an effective distribution and of a sourse function in the mathematical model of shadowed sputtering JO - Matematičeskoe modelirovanie PY - 1998 SP - 35 EP - 40 VL - 10 IS - 9 UR - http://geodesic.mathdoc.fr/item/MM_1998_10_9_a2/ LA - ru ID - MM_1998_10_9_a2 ER -
%0 Journal Article %A E. P. Zhidkov %A L. A. Sevastianov %T Macroparameters of an effective distribution and of a sourse function in the mathematical model of shadowed sputtering %J Matematičeskoe modelirovanie %D 1998 %P 35-40 %V 10 %N 9 %U http://geodesic.mathdoc.fr/item/MM_1998_10_9_a2/ %G ru %F MM_1998_10_9_a2
E. P. Zhidkov; L. A. Sevastianov. Macroparameters of an effective distribution and of a sourse function in the mathematical model of shadowed sputtering. Matematičeskoe modelirovanie, Tome 10 (1998) no. 9, pp. 35-40. http://geodesic.mathdoc.fr/item/MM_1998_10_9_a2/