Macroparameters of an effective distribution and of a~sourse function in the mathematical model of shadowed sputtering
Matematičeskoe modelirovanie, Tome 10 (1998) no. 9, pp. 35-40.

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The investigation is presented of an existence of the unique shadowing shields for a set of close by their characteristics and sputtering conditions effective distribution of sputtered particles and source function, so as their stability for small variations of shadowed sputtering parameters.
@article{MM_1998_10_9_a2,
     author = {E. P. Zhidkov and L. A. Sevastianov},
     title = {Macroparameters of an effective distribution and of a~sourse function in the mathematical model of shadowed sputtering},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {35--40},
     publisher = {mathdoc},
     volume = {10},
     number = {9},
     year = {1998},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_1998_10_9_a2/}
}
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E. P. Zhidkov; L. A. Sevastianov. Macroparameters of an effective distribution and of a~sourse function in the mathematical model of shadowed sputtering. Matematičeskoe modelirovanie, Tome 10 (1998) no. 9, pp. 35-40. http://geodesic.mathdoc.fr/item/MM_1998_10_9_a2/