Matematičeskoe modelirovanie, Tome 10 (1998) no. 4, pp. 13-22
Citer cet article
L. A. Sevastianov. The mathematical model of shadowed sputtering. Matematičeskoe modelirovanie, Tome 10 (1998) no. 4, pp. 13-22. http://geodesic.mathdoc.fr/item/MM_1998_10_4_a1/
@article{MM_1998_10_4_a1,
author = {L. A. Sevastianov},
title = {The mathematical model of shadowed sputtering},
journal = {Matemati\v{c}eskoe modelirovanie},
pages = {13--22},
year = {1998},
volume = {10},
number = {4},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/MM_1998_10_4_a1/}
}
TY - JOUR
AU - L. A. Sevastianov
TI - The mathematical model of shadowed sputtering
JO - Matematičeskoe modelirovanie
PY - 1998
SP - 13
EP - 22
VL - 10
IS - 4
UR - http://geodesic.mathdoc.fr/item/MM_1998_10_4_a1/
LA - ru
ID - MM_1998_10_4_a1
ER -
%0 Journal Article
%A L. A. Sevastianov
%T The mathematical model of shadowed sputtering
%J Matematičeskoe modelirovanie
%D 1998
%P 13-22
%V 10
%N 4
%U http://geodesic.mathdoc.fr/item/MM_1998_10_4_a1/
%G ru
%F MM_1998_10_4_a1
The analysis of shadowing effects in vacuum sputtering process shows that the mathematical model of the sputtering through arbitrary shield on a substrate of any form is described by the integral equation of the first type.
