Geodesic
The mathematical model of shadowed sputtering
Matematičeskoe modelirovanie, Tome 10 (1998) no. 4, pp. 13-22.

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The analysis of shadowing effects in vacuum sputtering process shows that the mathematical model of the sputtering through arbitrary shield on a substrate of any form is described by the integral equation of the first type. 
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     author = {L. A. Sevastianov},
     title = {The mathematical model of shadowed sputtering},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {13--22},
     publisher = {mathdoc},
     volume = {10},
     number = {4},
     year = {1998},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_1998_10_4_a1/}
}
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L. A. Sevastianov. The mathematical model of shadowed sputtering. Matematičeskoe modelirovanie, Tome 10 (1998) no. 4, pp. 13-22. http://geodesic.mathdoc.fr/item/MM_1998_10_4_a1/