Matematičeskoe modelirovanie, Tome 8 (1996) no. 1, pp. 25-38
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I. E. Mozolevski. About mathematical modelling of multidimensional ion implantation problems. Matematičeskoe modelirovanie, Tome 8 (1996) no. 1, pp. 25-38. http://geodesic.mathdoc.fr/item/MM_1996_8_1_a2/
@article{MM_1996_8_1_a2,
author = {I. E. Mozolevski},
title = {About mathematical modelling of multidimensional ion implantation problems},
journal = {Matemati\v{c}eskoe modelirovanie},
pages = {25--38},
year = {1996},
volume = {8},
number = {1},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/MM_1996_8_1_a2/}
}
TY - JOUR
AU - I. E. Mozolevski
TI - About mathematical modelling of multidimensional ion implantation problems
JO - Matematičeskoe modelirovanie
PY - 1996
SP - 25
EP - 38
VL - 8
IS - 1
UR - http://geodesic.mathdoc.fr/item/MM_1996_8_1_a2/
LA - ru
ID - MM_1996_8_1_a2
ER -
%0 Journal Article
%A I. E. Mozolevski
%T About mathematical modelling of multidimensional ion implantation problems
%J Matematičeskoe modelirovanie
%D 1996
%P 25-38
%V 8
%N 1
%U http://geodesic.mathdoc.fr/item/MM_1996_8_1_a2/
%G ru
%F MM_1996_8_1_a2
Some aspects of simulation of interaction of fluxes of acseleratedi ons with solids in multidimensional problems of ion implantation are considered. Mathematical model and computational algorithm for its realisation are proposed. The numerical simulation results are presented and comparison with experimental data and Monte-Carlo simulation results is effectuated.
