Matematičeskoe modelirovanie, Tome 8 (1996) no. 10, pp. 113-127
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Yu. A. Eremin; N. V. Orlov; A. G. Sveshnikov. Analysis of mathematical model of silicon wafers contamination based on discrete sources method. Matematičeskoe modelirovanie, Tome 8 (1996) no. 10, pp. 113-127. http://geodesic.mathdoc.fr/item/MM_1996_8_10_a10/
@article{MM_1996_8_10_a10,
author = {Yu. A. Eremin and N. V. Orlov and A. G. Sveshnikov},
title = {Analysis of mathematical model of silicon wafers contamination based on discrete sources method},
journal = {Matemati\v{c}eskoe modelirovanie},
pages = {113--127},
year = {1996},
volume = {8},
number = {10},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/MM_1996_8_10_a10/}
}
TY - JOUR
AU - Yu. A. Eremin
AU - N. V. Orlov
AU - A. G. Sveshnikov
TI - Analysis of mathematical model of silicon wafers contamination based on discrete sources method
JO - Matematičeskoe modelirovanie
PY - 1996
SP - 113
EP - 127
VL - 8
IS - 10
UR - http://geodesic.mathdoc.fr/item/MM_1996_8_10_a10/
LA - ru
ID - MM_1996_8_10_a10
ER -
%0 Journal Article
%A Yu. A. Eremin
%A N. V. Orlov
%A A. G. Sveshnikov
%T Analysis of mathematical model of silicon wafers contamination based on discrete sources method
%J Matematičeskoe modelirovanie
%D 1996
%P 113-127
%V 8
%N 10
%U http://geodesic.mathdoc.fr/item/MM_1996_8_10_a10/
%G ru
%F MM_1996_8_10_a10
On the basis of discrete sources method the complete mathematical model for the problem of light scattering from a penetrable particle located at an interface surface is considered. Numerical aspects of the problem are examined. Some examples of numerical analysis are given.
