Geodesic
Analysis of mathematical model of silicon wafers contamination based on discrete sources method
Matematičeskoe modelirovanie, Tome 8 (1996) no. 10, pp. 113-127.

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On the basis of discrete sources method the complete mathematical model for the problem of light scattering from a penetrable particle located at an interface surface is considered. Numerical aspects of the problem are examined. Some examples of numerical analysis are given. 
@article{MM_1996_8_10_a10,
     author = {Yu. A. Eremin and N. V. Orlov and A. G. Sveshnikov},
     title = {Analysis of mathematical model of silicon wafers contamination based on discrete sources method},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {113--127},
     publisher = {mathdoc},
     volume = {8},
     number = {10},
     year = {1996},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_1996_8_10_a10/}
}
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Yu. A. Eremin; N. V. Orlov; A. G. Sveshnikov. Analysis of mathematical model of silicon wafers contamination based on discrete sources method. Matematičeskoe modelirovanie, Tome 8 (1996) no. 10, pp. 113-127. http://geodesic.mathdoc.fr/item/MM_1996_8_10_a10/