Analysis of mathematical model of silicon wafers contamination based on discrete sources method
Matematičeskoe modelirovanie, Tome 8 (1996) no. 10, pp. 113-127
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On the basis of discrete sources method the complete mathematical model for the problem of light scattering from a penetrable particle located at an interface surface is considered. Numerical aspects of the problem are examined. Some examples of numerical analysis are given.
@article{MM_1996_8_10_a10,
author = {Yu. A. Eremin and N. V. Orlov and A. G. Sveshnikov},
title = {Analysis of mathematical model of silicon wafers contamination based on discrete sources method},
journal = {Matemati\v{c}eskoe modelirovanie},
pages = {113--127},
year = {1996},
volume = {8},
number = {10},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/MM_1996_8_10_a10/}
}
TY - JOUR AU - Yu. A. Eremin AU - N. V. Orlov AU - A. G. Sveshnikov TI - Analysis of mathematical model of silicon wafers contamination based on discrete sources method JO - Matematičeskoe modelirovanie PY - 1996 SP - 113 EP - 127 VL - 8 IS - 10 UR - http://geodesic.mathdoc.fr/item/MM_1996_8_10_a10/ LA - ru ID - MM_1996_8_10_a10 ER -
%0 Journal Article %A Yu. A. Eremin %A N. V. Orlov %A A. G. Sveshnikov %T Analysis of mathematical model of silicon wafers contamination based on discrete sources method %J Matematičeskoe modelirovanie %D 1996 %P 113-127 %V 8 %N 10 %U http://geodesic.mathdoc.fr/item/MM_1996_8_10_a10/ %G ru %F MM_1996_8_10_a10
Yu. A. Eremin; N. V. Orlov; A. G. Sveshnikov. Analysis of mathematical model of silicon wafers contamination based on discrete sources method. Matematičeskoe modelirovanie, Tome 8 (1996) no. 10, pp. 113-127. http://geodesic.mathdoc.fr/item/MM_1996_8_10_a10/