The code for modelling of the photolithographic process of the protective pattern forming by use of positive photoresistors
Matematičeskoe modelirovanie, Tome 7 (1995) no. 1, pp. 110-117
Cet article a éte moissonné depuis la source Math-Net.Ru
@article{MM_1995_7_1_a8,
author = {V. I. Cherednik and V. M. Treushnikov and A. V. Oleynik and O. A. Usacheva},
title = {The code for modelling of the photolithographic process of the protective pattern forming by use of positive photoresistors},
journal = {Matemati\v{c}eskoe modelirovanie},
pages = {110--117},
year = {1995},
volume = {7},
number = {1},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/MM_1995_7_1_a8/}
}
TY - JOUR AU - V. I. Cherednik AU - V. M. Treushnikov AU - A. V. Oleynik AU - O. A. Usacheva TI - The code for modelling of the photolithographic process of the protective pattern forming by use of positive photoresistors JO - Matematičeskoe modelirovanie PY - 1995 SP - 110 EP - 117 VL - 7 IS - 1 UR - http://geodesic.mathdoc.fr/item/MM_1995_7_1_a8/ LA - ru ID - MM_1995_7_1_a8 ER -
%0 Journal Article %A V. I. Cherednik %A V. M. Treushnikov %A A. V. Oleynik %A O. A. Usacheva %T The code for modelling of the photolithographic process of the protective pattern forming by use of positive photoresistors %J Matematičeskoe modelirovanie %D 1995 %P 110-117 %V 7 %N 1 %U http://geodesic.mathdoc.fr/item/MM_1995_7_1_a8/ %G ru %F MM_1995_7_1_a8
V. I. Cherednik; V. M. Treushnikov; A. V. Oleynik; O. A. Usacheva. The code for modelling of the photolithographic process of the protective pattern forming by use of positive photoresistors. Matematičeskoe modelirovanie, Tome 7 (1995) no. 1, pp. 110-117. http://geodesic.mathdoc.fr/item/MM_1995_7_1_a8/