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@article{MM_1995_7_1_a8, author = {V. I. Cherednik and V. M. Treushnikov and A. V. Oleynik and O. A. Usacheva}, title = {The code for modelling of the photolithographic process of the protective pattern forming by use of positive photoresistors}, journal = {Matemati\v{c}eskoe modelirovanie}, pages = {110--117}, publisher = {mathdoc}, volume = {7}, number = {1}, year = {1995}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/MM_1995_7_1_a8/} }
TY - JOUR AU - V. I. Cherednik AU - V. M. Treushnikov AU - A. V. Oleynik AU - O. A. Usacheva TI - The code for modelling of the photolithographic process of the protective pattern forming by use of positive photoresistors JO - Matematičeskoe modelirovanie PY - 1995 SP - 110 EP - 117 VL - 7 IS - 1 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/MM_1995_7_1_a8/ LA - ru ID - MM_1995_7_1_a8 ER -
%0 Journal Article %A V. I. Cherednik %A V. M. Treushnikov %A A. V. Oleynik %A O. A. Usacheva %T The code for modelling of the photolithographic process of the protective pattern forming by use of positive photoresistors %J Matematičeskoe modelirovanie %D 1995 %P 110-117 %V 7 %N 1 %I mathdoc %U http://geodesic.mathdoc.fr/item/MM_1995_7_1_a8/ %G ru %F MM_1995_7_1_a8
V. I. Cherednik; V. M. Treushnikov; A. V. Oleynik; O. A. Usacheva. The code for modelling of the photolithographic process of the protective pattern forming by use of positive photoresistors. Matematičeskoe modelirovanie, Tome 7 (1995) no. 1, pp. 110-117. http://geodesic.mathdoc.fr/item/MM_1995_7_1_a8/