Matematičeskoe modelirovanie, Tome 6 (1994) no. 9, pp. 68-78
Citer cet article
K. A. Volosov; L. B. Arkhipenko. Problem of mathematical modelling of silicon oxidation. Matematičeskoe modelirovanie, Tome 6 (1994) no. 9, pp. 68-78. http://geodesic.mathdoc.fr/item/MM_1994_6_9_a8/
@article{MM_1994_6_9_a8,
author = {K. A. Volosov and L. B. Arkhipenko},
title = {Problem of mathematical modelling of silicon oxidation},
journal = {Matemati\v{c}eskoe modelirovanie},
pages = {68--78},
year = {1994},
volume = {6},
number = {9},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/MM_1994_6_9_a8/}
}
TY - JOUR
AU - K. A. Volosov
AU - L. B. Arkhipenko
TI - Problem of mathematical modelling of silicon oxidation
JO - Matematičeskoe modelirovanie
PY - 1994
SP - 68
EP - 78
VL - 6
IS - 9
UR - http://geodesic.mathdoc.fr/item/MM_1994_6_9_a8/
LA - ru
ID - MM_1994_6_9_a8
ER -
%0 Journal Article
%A K. A. Volosov
%A L. B. Arkhipenko
%T Problem of mathematical modelling of silicon oxidation
%J Matematičeskoe modelirovanie
%D 1994
%P 68-78
%V 6
%N 9
%U http://geodesic.mathdoc.fr/item/MM_1994_6_9_a8/
%G ru
%F MM_1994_6_9_a8
In the paper a mathematical model of silicon oxidation is considered by using effective asymptotic methods. The well-known law of parabolic growth of oxide film is obtained.
