Matematičeskoe modelirovanie, Tome 3 (1991) no. 1, pp. 48-58
Citer cet article
B. I. Friedlender. On a low of approximate changing of “bird beak” during silicon oxidation in the presence of a mask. Matematičeskoe modelirovanie, Tome 3 (1991) no. 1, pp. 48-58. http://geodesic.mathdoc.fr/item/MM_1991_3_1_a5/
@article{MM_1991_3_1_a5,
author = {B. I. Friedlender},
title = {On a~low of approximate changing of {\textquotedblleft}bird beak{\textquotedblright} during silicon oxidation in the presence of a~mask},
journal = {Matemati\v{c}eskoe modelirovanie},
pages = {48--58},
year = {1991},
volume = {3},
number = {1},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/MM_1991_3_1_a5/}
}
TY - JOUR
AU - B. I. Friedlender
TI - On a low of approximate changing of “bird beak” during silicon oxidation in the presence of a mask
JO - Matematičeskoe modelirovanie
PY - 1991
SP - 48
EP - 58
VL - 3
IS - 1
UR - http://geodesic.mathdoc.fr/item/MM_1991_3_1_a5/
LA - ru
ID - MM_1991_3_1_a5
ER -
%0 Journal Article
%A B. I. Friedlender
%T On a low of approximate changing of “bird beak” during silicon oxidation in the presence of a mask
%J Matematičeskoe modelirovanie
%D 1991
%P 48-58
%V 3
%N 1
%U http://geodesic.mathdoc.fr/item/MM_1991_3_1_a5/
%G ru
%F MM_1991_3_1_a5
The problem is investigated of silicon oxydizing. It is shown that the solution of the problem is self-similiar. The velosity of sharp-formed critical point (“bird beak”) and approximate size of “bеак” are found. The results of calculations are presented for silicon oxydizing by dry and wet oxygen.
