Geodesic
On a~low of approximate changing of ``bird beak'' during silicon oxidation in the presence of a~mask
Matematičeskoe modelirovanie, Tome 3 (1991) no. 1, pp. 48-58.

Voir la notice de l'article provenant de la source Math-Net.Ru

The problem is investigated of silicon oxydizing. It is shown that the solution of the problem is self-similiar. The velosity of sharp-formed critical point (“bird beak”) and approximate size of “bеак” are found. The results of calculations are presented for silicon oxydizing by dry and wet oxygen. 
@article{MM_1991_3_1_a5,
     author = {B. I. Friedlender},
     title = {On a~low of approximate changing of ``bird beak'' during silicon oxidation in the presence of a~mask},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {48--58},
     publisher = {mathdoc},
     volume = {3},
     number = {1},
     year = {1991},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_1991_3_1_a5/}
}
TY  - JOUR
AU  - B. I. Friedlender
TI  - On a~low of approximate changing of ``bird beak'' during silicon oxidation in the presence of a~mask
JO  - Matematičeskoe modelirovanie
PY  - 1991
SP  - 48
EP  - 58
VL  - 3
IS  - 1
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/MM_1991_3_1_a5/
LA  - ru
ID  - MM_1991_3_1_a5
ER  - 
%0 Journal Article
%A B. I. Friedlender
%T On a~low of approximate changing of ``bird beak'' during silicon oxidation in the presence of a~mask
%J Matematičeskoe modelirovanie
%D 1991
%P 48-58
%V 3
%N 1
%I mathdoc
%U http://geodesic.mathdoc.fr/item/MM_1991_3_1_a5/
%G ru
%F MM_1991_3_1_a5
B. I. Friedlender. On a~low of approximate changing of ``bird beak'' during silicon oxidation in the presence of a~mask. Matematičeskoe modelirovanie, Tome 3 (1991) no. 1, pp. 48-58. http://geodesic.mathdoc.fr/item/MM_1991_3_1_a5/