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@article{MM_1991_3_1_a1, author = {T. M. Makhviladze and E. G. Panteleev and M. E. Sarychev}, title = {Theoretical study of polymer resist direct etching by heavy ions of average energy}, journal = {Matemati\v{c}eskoe modelirovanie}, pages = {11--17}, publisher = {mathdoc}, volume = {3}, number = {1}, year = {1991}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/MM_1991_3_1_a1/} }
TY - JOUR AU - T. M. Makhviladze AU - E. G. Panteleev AU - M. E. Sarychev TI - Theoretical study of polymer resist direct etching by heavy ions of average energy JO - Matematičeskoe modelirovanie PY - 1991 SP - 11 EP - 17 VL - 3 IS - 1 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/MM_1991_3_1_a1/ LA - ru ID - MM_1991_3_1_a1 ER -
%0 Journal Article %A T. M. Makhviladze %A E. G. Panteleev %A M. E. Sarychev %T Theoretical study of polymer resist direct etching by heavy ions of average energy %J Matematičeskoe modelirovanie %D 1991 %P 11-17 %V 3 %N 1 %I mathdoc %U http://geodesic.mathdoc.fr/item/MM_1991_3_1_a1/ %G ru %F MM_1991_3_1_a1
T. M. Makhviladze; E. G. Panteleev; M. E. Sarychev. Theoretical study of polymer resist direct etching by heavy ions of average energy. Matematičeskoe modelirovanie, Tome 3 (1991) no. 1, pp. 11-17. http://geodesic.mathdoc.fr/item/MM_1991_3_1_a1/