Matematičeskoe modelirovanie, Tome 1 (1989) no. 2, pp. 160-164
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A. L. Bogdanov; K. A. Valiev; L. V. Velikov; D. Yu. Zaroslov; V. A. Nikitaev; V. E. Tukish. A method of data processing for the interferometric control of dissolution of resist film. Matematičeskoe modelirovanie, Tome 1 (1989) no. 2, pp. 160-164. http://geodesic.mathdoc.fr/item/MM_1989_1_2_a9/
@article{MM_1989_1_2_a9,
author = {A. L. Bogdanov and K. A. Valiev and L. V. Velikov and D. Yu. Zaroslov and V. A. Nikitaev and V. E. Tukish},
title = {A~method of data processing for the interferometric control of dissolution of resist film},
journal = {Matemati\v{c}eskoe modelirovanie},
pages = {160--164},
year = {1989},
volume = {1},
number = {2},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/MM_1989_1_2_a9/}
}
TY - JOUR
AU - A. L. Bogdanov
AU - K. A. Valiev
AU - L. V. Velikov
AU - D. Yu. Zaroslov
AU - V. A. Nikitaev
AU - V. E. Tukish
TI - A method of data processing for the interferometric control of dissolution of resist film
JO - Matematičeskoe modelirovanie
PY - 1989
SP - 160
EP - 164
VL - 1
IS - 2
UR - http://geodesic.mathdoc.fr/item/MM_1989_1_2_a9/
LA - ru
ID - MM_1989_1_2_a9
ER -
%0 Journal Article
%A A. L. Bogdanov
%A K. A. Valiev
%A L. V. Velikov
%A D. Yu. Zaroslov
%A V. A. Nikitaev
%A V. E. Tukish
%T A method of data processing for the interferometric control of dissolution of resist film
%J Matematičeskoe modelirovanie
%D 1989
%P 160-164
%V 1
%N 2
%U http://geodesic.mathdoc.fr/item/MM_1989_1_2_a9/
%G ru
%F MM_1989_1_2_a9
