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@article{MM_1989_1_2_a9,
author = {A. L. Bogdanov and K. A. Valiev and L. V. Velikov and D. Yu. Zaroslov and V. A. Nikitaev and V. E. Tukish},
title = {A~method of data processing for the interferometric control of dissolution of resist film},
journal = {Matemati\v{c}eskoe modelirovanie},
pages = {160--164},
publisher = {mathdoc},
volume = {1},
number = {2},
year = {1989},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/MM_1989_1_2_a9/}
}
TY - JOUR AU - A. L. Bogdanov AU - K. A. Valiev AU - L. V. Velikov AU - D. Yu. Zaroslov AU - V. A. Nikitaev AU - V. E. Tukish TI - A~method of data processing for the interferometric control of dissolution of resist film JO - Matematičeskoe modelirovanie PY - 1989 SP - 160 EP - 164 VL - 1 IS - 2 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/MM_1989_1_2_a9/ LA - ru ID - MM_1989_1_2_a9 ER -
%0 Journal Article %A A. L. Bogdanov %A K. A. Valiev %A L. V. Velikov %A D. Yu. Zaroslov %A V. A. Nikitaev %A V. E. Tukish %T A~method of data processing for the interferometric control of dissolution of resist film %J Matematičeskoe modelirovanie %D 1989 %P 160-164 %V 1 %N 2 %I mathdoc %U http://geodesic.mathdoc.fr/item/MM_1989_1_2_a9/ %G ru %F MM_1989_1_2_a9
A. L. Bogdanov; K. A. Valiev; L. V. Velikov; D. Yu. Zaroslov; V. A. Nikitaev; V. E. Tukish. A~method of data processing for the interferometric control of dissolution of resist film. Matematičeskoe modelirovanie, Tome 1 (1989) no. 2, pp. 160-164. http://geodesic.mathdoc.fr/item/MM_1989_1_2_a9/