Matematicheskoe Modelirovanie i Kraevye Zadachi, Proceedings of the Sixth All-Russian Scientific Conference with international participation (1–4 June 2009). Part 3, Tome 3 (2009), pp. 138-141
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A. C. Kairakbaev. Свойства коэффициентов модели разложения тетрахлорокремния в тлеющем разряде. Matematicheskoe Modelirovanie i Kraevye Zadachi, Proceedings of the Sixth All-Russian Scientific Conference with international participation (1–4 June 2009). Part 3, Tome 3 (2009), pp. 138-141. http://geodesic.mathdoc.fr/item/MMKZ_2009_3_a32/
@article{MMKZ_2009_3_a32,
author = {A. C. Kairakbaev},
title = {{\CYRS}{\cyrv}{\cyro}{\cyrishrt}{\cyrs}{\cyrt}{\cyrv}{\cyra} {\cyrk}{\cyro}{\cyrerev}{\cyrf}{\cyrf}{\cyri}{\cyrc}{\cyri}{\cyre}{\cyrn}{\cyrt}{\cyro}{\cyrv} {\cyrm}{\cyro}{\cyrd}{\cyre}{\cyrl}{\cyri} {\cyrr}{\cyra}{\cyrz}{\cyrl}{\cyro}{\cyrzh}{\cyre}{\cyrn}{\cyri}{\cyrya} {\cyrt}{\cyre}{\cyrt}{\cyrr}{\cyra}{\cyrh}{\cyrl}{\cyro}{\cyrr}{\cyro}{\cyrk}{\cyrr}{\cyre}{\cyrm}{\cyrn}{\cyri}{\cyrya} {\cyrv} {\cyrt}{\cyrl}{\cyre}{\cyryu}{\cyrshch}{\cyre}{\cyrm} {\cyrr}{\cyra}{\cyrz}{\cyrr}{\cyrya}{\cyrd}{\cyre}},
journal = {Matematicheskoe Modelirovanie i Kraevye Zadachi},
pages = {138--141},
year = {2009},
volume = {3},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/MMKZ_2009_3_a32/}
}
TY - JOUR
AU - A. C. Kairakbaev
TI - Свойства коэффициентов модели разложения тетрахлорокремния в тлеющем разряде
JO - Matematicheskoe Modelirovanie i Kraevye Zadachi
PY - 2009
SP - 138
EP - 141
VL - 3
UR - http://geodesic.mathdoc.fr/item/MMKZ_2009_3_a32/
LA - ru
ID - MMKZ_2009_3_a32
ER -
%0 Journal Article
%A A. C. Kairakbaev
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%J Matematicheskoe Modelirovanie i Kraevye Zadachi
%D 2009
%P 138-141
%V 3
%U http://geodesic.mathdoc.fr/item/MMKZ_2009_3_a32/
%G ru
%F MMKZ_2009_3_a32
[1] Blinov L. M., Golovkin A. G., Kaganov L. I., etc., “Tetrochlorosilane Consumption in Radio Frequency Glow Discharge”, Plasma Chem. Plasma Process, 18:4 (1998), 509–533 | DOI
