Doklady Akademii Nauk, Tome 294 (1987) no. 6, pp. 1358-1362
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V. P. Ageev; I. V. Baranenkov; K. A. Valiev; L. V. Velikov; V. I. Konov; A. I. Maslakov; V. M. Melnikov; A. M. Prokhorov. Application of metal resinate films in electron- and photolithography. Doklady Akademii Nauk, Tome 294 (1987) no. 6, pp. 1358-1362. http://geodesic.mathdoc.fr/item/DAN_1987_294_6_a16/
@article{DAN_1987_294_6_a16,
author = {V. P. Ageev and I. V. Baranenkov and K. A. Valiev and L. V. Velikov and V. I. Konov and A. I. Maslakov and V. M. Melnikov and A. M. Prokhorov},
title = {Application of metal resinate films in electron- and photolithography},
journal = {Doklady Akademii Nauk},
pages = {1358--1362},
year = {1987},
volume = {294},
number = {6},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/DAN_1987_294_6_a16/}
}
TY - JOUR
AU - V. P. Ageev
AU - I. V. Baranenkov
AU - K. A. Valiev
AU - L. V. Velikov
AU - V. I. Konov
AU - A. I. Maslakov
AU - V. M. Melnikov
AU - A. M. Prokhorov
TI - Application of metal resinate films in electron- and photolithography
JO - Doklady Akademii Nauk
PY - 1987
SP - 1358
EP - 1362
VL - 294
IS - 6
UR - http://geodesic.mathdoc.fr/item/DAN_1987_294_6_a16/
LA - ru
ID - DAN_1987_294_6_a16
ER -
%0 Journal Article
%A V. P. Ageev
%A I. V. Baranenkov
%A K. A. Valiev
%A L. V. Velikov
%A V. I. Konov
%A A. I. Maslakov
%A V. M. Melnikov
%A A. M. Prokhorov
%T Application of metal resinate films in electron- and photolithography
%J Doklady Akademii Nauk
%D 1987
%P 1358-1362
%V 294
%N 6
%U http://geodesic.mathdoc.fr/item/DAN_1987_294_6_a16/
%G ru
%F DAN_1987_294_6_a16
