Voir la notice de l'article provenant de la source Math-Net.Ru
@article{DAN_1987_294_6_a16,
author = {V. P. Ageev and I. V. Baranenkov and K. A. Valiev and L. V. Velikov and V. I. Konov and A. I. Maslakov and V. M. Melnikov and A. M. Prokhorov},
title = {Application of metal resinate films in electron- and photolithography},
journal = {Doklady Akademii Nauk},
pages = {1358--1362},
publisher = {mathdoc},
volume = {294},
number = {6},
year = {1987},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/DAN_1987_294_6_a16/}
}
TY - JOUR AU - V. P. Ageev AU - I. V. Baranenkov AU - K. A. Valiev AU - L. V. Velikov AU - V. I. Konov AU - A. I. Maslakov AU - V. M. Melnikov AU - A. M. Prokhorov TI - Application of metal resinate films in electron- and photolithography JO - Doklady Akademii Nauk PY - 1987 SP - 1358 EP - 1362 VL - 294 IS - 6 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/DAN_1987_294_6_a16/ LA - ru ID - DAN_1987_294_6_a16 ER -
%0 Journal Article %A V. P. Ageev %A I. V. Baranenkov %A K. A. Valiev %A L. V. Velikov %A V. I. Konov %A A. I. Maslakov %A V. M. Melnikov %A A. M. Prokhorov %T Application of metal resinate films in electron- and photolithography %J Doklady Akademii Nauk %D 1987 %P 1358-1362 %V 294 %N 6 %I mathdoc %U http://geodesic.mathdoc.fr/item/DAN_1987_294_6_a16/ %G ru %F DAN_1987_294_6_a16
V. P. Ageev; I. V. Baranenkov; K. A. Valiev; L. V. Velikov; V. I. Konov; A. I. Maslakov; V. M. Melnikov; A. M. Prokhorov. Application of metal resinate films in electron- and photolithography. Doklady Akademii Nauk, Tome 294 (1987) no. 6, pp. 1358-1362. http://geodesic.mathdoc.fr/item/DAN_1987_294_6_a16/