Doklady Akademii Nauk, Tome 215 (1974) no. 3, pp. 562-564
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V. P. Zakharov; I. M. Protas. Mass-spectrometric study of the conditions of semiconductor amorphous film formation in the condensation from vapour phase. Doklady Akademii Nauk, Tome 215 (1974) no. 3, pp. 562-564. http://geodesic.mathdoc.fr/item/DAN_1974_215_3_a16/
@article{DAN_1974_215_3_a16,
author = {V. P. Zakharov and I. M. Protas},
title = {Mass-spectrometric study of the conditions of semiconductor amorphous film formation in the condensation from vapour phase},
journal = {Doklady Akademii Nauk},
pages = {562--564},
year = {1974},
volume = {215},
number = {3},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/DAN_1974_215_3_a16/}
}
TY - JOUR
AU - V. P. Zakharov
AU - I. M. Protas
TI - Mass-spectrometric study of the conditions of semiconductor amorphous film formation in the condensation from vapour phase
JO - Doklady Akademii Nauk
PY - 1974
SP - 562
EP - 564
VL - 215
IS - 3
UR - http://geodesic.mathdoc.fr/item/DAN_1974_215_3_a16/
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%D 1974
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