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@article{DAN_1974_215_3_a16, author = {V. P. Zakharov and I. M. Protas}, title = {Mass-spectrometric study of the conditions of semiconductor amorphous film formation in the condensation from vapour phase}, journal = {Doklady Akademii Nauk}, pages = {562--564}, publisher = {mathdoc}, volume = {215}, number = {3}, year = {1974}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/DAN_1974_215_3_a16/} }
TY - JOUR AU - V. P. Zakharov AU - I. M. Protas TI - Mass-spectrometric study of the conditions of semiconductor amorphous film formation in the condensation from vapour phase JO - Doklady Akademii Nauk PY - 1974 SP - 562 EP - 564 VL - 215 IS - 3 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/DAN_1974_215_3_a16/ LA - ru ID - DAN_1974_215_3_a16 ER -
%0 Journal Article %A V. P. Zakharov %A I. M. Protas %T Mass-spectrometric study of the conditions of semiconductor amorphous film formation in the condensation from vapour phase %J Doklady Akademii Nauk %D 1974 %P 562-564 %V 215 %N 3 %I mathdoc %U http://geodesic.mathdoc.fr/item/DAN_1974_215_3_a16/ %G ru %F DAN_1974_215_3_a16
V. P. Zakharov; I. M. Protas. Mass-spectrometric study of the conditions of semiconductor amorphous film formation in the condensation from vapour phase. Doklady Akademii Nauk, Tome 215 (1974) no. 3, pp. 562-564. http://geodesic.mathdoc.fr/item/DAN_1974_215_3_a16/