Mass-spectrometric study of the conditions of semiconductor amorphous film formation in the condensation from vapour phase
Doklady Akademii Nauk, Tome 215 (1974) no. 3, pp. 562-564.

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     author = {V. P. Zakharov and I. M. Protas},
     title = {Mass-spectrometric study of the conditions of semiconductor amorphous film formation in the condensation from vapour phase},
     journal = {Doklady Akademii Nauk},
     pages = {562--564},
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     number = {3},
     year = {1974},
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     url = {http://geodesic.mathdoc.fr/item/DAN_1974_215_3_a16/}
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V. P. Zakharov; I. M. Protas. Mass-spectrometric study of the conditions of semiconductor amorphous film formation in the condensation from vapour phase. Doklady Akademii Nauk, Tome 215 (1974) no. 3, pp. 562-564. http://geodesic.mathdoc.fr/item/DAN_1974_215_3_a16/