Doklady Akademii Nauk, Tome 189 (1969) no. 2, pp. 302-304
Citer cet article
O. B. Firsov. Target sputtering as dependent on the incidence angle of the bombarding particles. Doklady Akademii Nauk, Tome 189 (1969) no. 2, pp. 302-304. http://geodesic.mathdoc.fr/item/DAN_1969_189_2_a21/
@article{DAN_1969_189_2_a21,
author = {O. B. Firsov},
title = {Target sputtering as dependent on the incidence angle of the bombarding particles},
journal = {Doklady Akademii Nauk},
pages = {302--304},
year = {1969},
volume = {189},
number = {2},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/DAN_1969_189_2_a21/}
}
TY - JOUR
AU - O. B. Firsov
TI - Target sputtering as dependent on the incidence angle of the bombarding particles
JO - Doklady Akademii Nauk
PY - 1969
SP - 302
EP - 304
VL - 189
IS - 2
UR - http://geodesic.mathdoc.fr/item/DAN_1969_189_2_a21/
LA - ru
ID - DAN_1969_189_2_a21
ER -
%0 Journal Article
%A O. B. Firsov
%T Target sputtering as dependent on the incidence angle of the bombarding particles
%J Doklady Akademii Nauk
%D 1969
%P 302-304
%V 189
%N 2
%U http://geodesic.mathdoc.fr/item/DAN_1969_189_2_a21/
%G ru
%F DAN_1969_189_2_a21
