Target sputtering as dependent on the incidence angle of the bombarding particles
Doklady Akademii Nauk, Tome 189 (1969) no. 2, pp. 302-304
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@article{DAN_1969_189_2_a21,
author = {O. B. Firsov},
title = {Target sputtering as dependent on the incidence angle of the bombarding particles},
journal = {Doklady Akademii Nauk},
pages = {302--304},
year = {1969},
volume = {189},
number = {2},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/DAN_1969_189_2_a21/}
}
O. B. Firsov. Target sputtering as dependent on the incidence angle of the bombarding particles. Doklady Akademii Nauk, Tome 189 (1969) no. 2, pp. 302-304. http://geodesic.mathdoc.fr/item/DAN_1969_189_2_a21/