The structure of the oxide films obtained by bombarding the surface of silicon with oxygen ions
Doklady Akademii Nauk, Tome 172 (1967) no. 3, pp. 588-590
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@article{DAN_1967_172_3_a19,
author = {P. V. Pavlov and \`E. V. Shitova},
title = {The structure of the oxide films obtained by bombarding the surface of silicon with oxygen ions},
journal = {Doklady Akademii Nauk},
pages = {588--590},
year = {1967},
volume = {172},
number = {3},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/DAN_1967_172_3_a19/}
}
TY - JOUR AU - P. V. Pavlov AU - È. V. Shitova TI - The structure of the oxide films obtained by bombarding the surface of silicon with oxygen ions JO - Doklady Akademii Nauk PY - 1967 SP - 588 EP - 590 VL - 172 IS - 3 UR - http://geodesic.mathdoc.fr/item/DAN_1967_172_3_a19/ LA - ru ID - DAN_1967_172_3_a19 ER -
P. V. Pavlov; È. V. Shitova. The structure of the oxide films obtained by bombarding the surface of silicon with oxygen ions. Doklady Akademii Nauk, Tome 172 (1967) no. 3, pp. 588-590. http://geodesic.mathdoc.fr/item/DAN_1967_172_3_a19/