Etching Effects of Low Temperature Hydrogen plasma on encapsulated diamond transistors
Acta Universitatis Carolinae. Mathematica et Physica, Tome 53 (2012) no. 2, pp. 97-103
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@article{AUCMP_2012__53_2_a10,
author = {Kr\'atk\'a, N. and Neykova, N. and Kromka, A and Rezek, B.},
title = {Etching {Effects} of {Low} {Temperature} {Hydrogen} plasma on encapsulated diamond transistors},
journal = {Acta Universitatis Carolinae. Mathematica et Physica},
pages = {97--103},
publisher = {mathdoc},
volume = {53},
number = {2},
year = {2012},
language = {en},
url = {http://geodesic.mathdoc.fr/item/AUCMP_2012__53_2_a10/}
}
TY - JOUR AU - Krátká, N. AU - Neykova, N. AU - Kromka, A AU - Rezek, B. TI - Etching Effects of Low Temperature Hydrogen plasma on encapsulated diamond transistors JO - Acta Universitatis Carolinae. Mathematica et Physica PY - 2012 SP - 97 EP - 103 VL - 53 IS - 2 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/AUCMP_2012__53_2_a10/ LA - en ID - AUCMP_2012__53_2_a10 ER -
%0 Journal Article %A Krátká, N. %A Neykova, N. %A Kromka, A %A Rezek, B. %T Etching Effects of Low Temperature Hydrogen plasma on encapsulated diamond transistors %J Acta Universitatis Carolinae. Mathematica et Physica %D 2012 %P 97-103 %V 53 %N 2 %I mathdoc %U http://geodesic.mathdoc.fr/item/AUCMP_2012__53_2_a10/ %G en %F AUCMP_2012__53_2_a10
Krátká, N.; Neykova, N.; Kromka, A; Rezek, B. Etching Effects of Low Temperature Hydrogen plasma on encapsulated diamond transistors. Acta Universitatis Carolinae. Mathematica et Physica, Tome 53 (2012) no. 2, pp. 97-103. http://geodesic.mathdoc.fr/item/AUCMP_2012__53_2_a10/