Methods for computer simulation of crystal sputtering
Žurnal vyčislitelʹnoj matematiki i matematičeskoj fiziki, Tome 48 (2008) no. 10, pp. 1908-1920
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A computer program for molecular dynamics simulation of sputtering is developed. Numerical methods for the integration of the equations of motion are described. Algorithms for constructing models of single-and polycrystalline targets are proposed. The applicability of various ion-atom and atom-atom interaction potentials to sputtering computations is analyzed.
@article{ZVMMF_2008_48_10_a11,
author = {E. Yu. Zykova and A. S. Mosunov and V. E. Yurasova},
title = {Methods for computer simulation of crystal sputtering},
journal = {\v{Z}urnal vy\v{c}islitelʹnoj matematiki i matemati\v{c}eskoj fiziki},
pages = {1908--1920},
publisher = {mathdoc},
volume = {48},
number = {10},
year = {2008},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/ZVMMF_2008_48_10_a11/}
}
TY - JOUR AU - E. Yu. Zykova AU - A. S. Mosunov AU - V. E. Yurasova TI - Methods for computer simulation of crystal sputtering JO - Žurnal vyčislitelʹnoj matematiki i matematičeskoj fiziki PY - 2008 SP - 1908 EP - 1920 VL - 48 IS - 10 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/ZVMMF_2008_48_10_a11/ LA - ru ID - ZVMMF_2008_48_10_a11 ER -
%0 Journal Article %A E. Yu. Zykova %A A. S. Mosunov %A V. E. Yurasova %T Methods for computer simulation of crystal sputtering %J Žurnal vyčislitelʹnoj matematiki i matematičeskoj fiziki %D 2008 %P 1908-1920 %V 48 %N 10 %I mathdoc %U http://geodesic.mathdoc.fr/item/ZVMMF_2008_48_10_a11/ %G ru %F ZVMMF_2008_48_10_a11
E. Yu. Zykova; A. S. Mosunov; V. E. Yurasova. Methods for computer simulation of crystal sputtering. Žurnal vyčislitelʹnoj matematiki i matematičeskoj fiziki, Tome 48 (2008) no. 10, pp. 1908-1920. http://geodesic.mathdoc.fr/item/ZVMMF_2008_48_10_a11/