Methods for computer simulation of crystal sputtering
Žurnal vyčislitelʹnoj matematiki i matematičeskoj fiziki, Tome 48 (2008) no. 10, pp. 1908-1920 Cet article a éte moissonné depuis la source Math-Net.Ru

Voir la notice de l'article

A computer program for molecular dynamics simulation of sputtering is developed. Numerical methods for the integration of the equations of motion are described. Algorithms for constructing models of single-and polycrystalline targets are proposed. The applicability of various ion-atom and atom-atom interaction potentials to sputtering computations is analyzed.
@article{ZVMMF_2008_48_10_a11,
     author = {E. Yu. Zykova and A. S. Mosunov and V. E. Yurasova},
     title = {Methods for computer simulation of crystal sputtering},
     journal = {\v{Z}urnal vy\v{c}islitelʹnoj matematiki i matemati\v{c}eskoj fiziki},
     pages = {1908--1920},
     year = {2008},
     volume = {48},
     number = {10},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/ZVMMF_2008_48_10_a11/}
}
TY  - JOUR
AU  - E. Yu. Zykova
AU  - A. S. Mosunov
AU  - V. E. Yurasova
TI  - Methods for computer simulation of crystal sputtering
JO  - Žurnal vyčislitelʹnoj matematiki i matematičeskoj fiziki
PY  - 2008
SP  - 1908
EP  - 1920
VL  - 48
IS  - 10
UR  - http://geodesic.mathdoc.fr/item/ZVMMF_2008_48_10_a11/
LA  - ru
ID  - ZVMMF_2008_48_10_a11
ER  - 
%0 Journal Article
%A E. Yu. Zykova
%A A. S. Mosunov
%A V. E. Yurasova
%T Methods for computer simulation of crystal sputtering
%J Žurnal vyčislitelʹnoj matematiki i matematičeskoj fiziki
%D 2008
%P 1908-1920
%V 48
%N 10
%U http://geodesic.mathdoc.fr/item/ZVMMF_2008_48_10_a11/
%G ru
%F ZVMMF_2008_48_10_a11
E. Yu. Zykova; A. S. Mosunov; V. E. Yurasova. Methods for computer simulation of crystal sputtering. Žurnal vyčislitelʹnoj matematiki i matematičeskoj fiziki, Tome 48 (2008) no. 10, pp. 1908-1920. http://geodesic.mathdoc.fr/item/ZVMMF_2008_48_10_a11/

[1] R. Behrisch (ed.), Sputtering by particle bombardment, v. 1, Springer, Berlin etc., 1981

[2] Nastasi M., Mayer J. W., Hirvonen J. K., Ion-solid interactions. Fundamentals and applications, Cambridge Univ. Press, 1996

[3] Yurasova B. E., Vzaimodeistvie ionov s poverkhnostyu, Prima V, M., 1999

[4] R. Behrisch, W. Eckstein (eds.), Sputtering by particle bombardment, v. IV, Springer, Berlin etc., 2007 | Zbl

[5] Leiman K., Vzaimodeistvie izlucheniya s tverdym telom i obrazovanie elementarnykh defektov, Atomizdat, M., 1979

[6] Ekshtain V., Kompyuternoe modelirovanie vzaimodeistviya chastits s poverkhnostyu tverdogo tela, Mir, M., 1995

[7] Torrens I. M., Interatomic potentials, Acad. Press, 1972

[8] Smith R.,Jakas M., Webb R. et al., Atomic and ion collisions in solids and surfaces, Cambridge Univ. Press, 1997

[9] Lindhard J., Sharff M., Shiott H. E., “Range concepts and heavy ion ranges. Note on atomic collisions. II”, Vidensk. Selsk. Mat. Fys. Medd., 33:14 (1963), 1

[10] Robinson M. T., Oen O. S., “Computer studies of the slowing down of energetic atoms in crystals”, Phys. Rev., 132:6 (1963), 2385 | DOI

[11] Shapiro M. H., Tombrello T. A., “Molecular dynamics simulations of inelastic energy loss effects in sputtering. II”, NIM B, 94 (1994), 186 | DOI

[12] Shapiro M. H., “Using molecular dynamics simulations to investigate sputtering processes: An overview”, Radiat. Effect. and Defect. Solids, 142 (1997), 259 | DOI

[13] Kunin S., Vychislitelnaya fizika, Mir, M., 1992

[14] Fedorenko R. P., Vvedenie v vychislitelnuyu fiziku, MFTI, M., 1994

[15] Valuev A. A., Norman G. E., Podlipchuk V. Yu., Matem. modelirovanie, Nauka, M., 1989, 5–40

[16] Yu. K. Tovbin (red.), Metod molekulyarnoi dinamiki v fizicheskoi khimii, Nauka, M., 1996

[17] Kalitkin H. H., Chislennye metody, Nauka, M., 1978 | MR

[18] Eltekov V. A., Vzaimodeistvie atomnykh chastits s tverdym telom, Izd-vo MGU, M., 1993

[19] Verlet L., “Computer “experiments” on classical fluids. I. Thermodynamical properties of Lennard–Jones Molecules”, Phys. Rev., 159 (1967), 98 | DOI

[20] Harrison D. E. Jr., Gay W. L., Effron H. M., “Algorithm for the calculation of the classical equations of motion of an $N$-body system”, J. Math. Phys., 10 (1969), 1179 | DOI | Zbl

[21] Press W. H., Teukolsky S. A., Vetterling W. T., Flannery B. P., Numerical recipes in FORTRAN, Cambridge Univ. Press, 1992 | MR

[22] Mosunov A. C., Chislennoe modelirovanie rasseyaniya ionov polikristallicheskoi poverkhnostyu, Preprint, NTsBI AN SSSR, Puschino, 1983

[23] Mosunov A. C., “Zavisimost energeticheskikh i prostranstvennykh raspredelenii rasseyannykh ionov ot relaksatsii pervogo sloya atomov poverkhnosti GTsK monokristalla”, Izv. RAN. Fizika, 58:4 (1994), 173–176

[24] Mosunov A. C., “Vliyanie smescheniya pervogo sloya atomov monokristallicheskoi poverkhnosti na kharakter raspyleniya”, Izv. RAN. Fizika, 60:4 (1996), 179–184

[25] Mosunov A. C., Mosunova I. I., Shelyakin L. B., Yurasova V. E., “Modelirovanie na EVM rasseyaniya ionov polikristallami”, Materialy V Vses. konf. po vzaimodeistviyu at. chastits s tverdym telom, v. 1, Minsk, 1978, 144–147

[26] Mosunov A. C., “Termodinamicheskii podkhod k issledovaniyu raspyleniya vblizi kriticheskikh tochek”, Materialy XIII Mezhdunar. konf. “Vzaimodeistvie ionov s poverkhnostyu”, v. 1, Zvenigorod, 1997, 25–29

[27] Born M., Mayer J. E., “Zur Gittertheorie der Ionenkristalle”, Z. Phys., 75 (1932), 1 | DOI

[28] Andersen H. H., Sigmund P., On the determination of interatomic potentials in metals by electron irradiation experiments, Riso Rep. no 103, 1965, 1 pp.

[29] Firsov O. B., “Vychislenie potentsiala vzaimodeistviya atomov”, Zh. eksperim. i teor. fiz., 33 (1957), 696 | Zbl

[30] Abrahamson A. A., “Born–Mayer-type interatomic potential for neutral ground-state atoms with $z=2-105$”, Phys. Rev., 178 (1969), 76 | DOI

[31] Bor H., Prokhozhdenie atomnykh chastits cherez veschestvo, Izd-vo inostr. lit., M., 1950

[32] Morse P. M., “Diatomic molecules according to the wave mechanics. II. Vibrational Levels”, Phys. Rev., 34 (1929), 57 | DOI | Zbl

[33] Girifalco L. A., Weizer V. G., “Application of the Morse potential function to cubic metals”, Phys. Rev., 114 (1959), 687 | DOI

[34] Fuchs K., “The elastic constants and specific heats of the alkali metals”, Proc. Roy. Soc., 153 (1936), 622 | DOI | Zbl

[35] Animalu A., Kvantovaya teoriya kristallicheskikh tverdykh tel, Mir, M., 1981

[36] Cauchy A. L., “Recherches sur l'equilibre et le mouvment interieur des corps solids on fluids elastiques ou non elastiques”, Bull. Sci. Philomatique, 1823, 9

[37] Cauchy A., “De la pression ou tension dans un systeme de points materiels”, Exercices de Math., 3 (1828), 213

[38] Leibfrid G., Mikroskopicheskaya teoriya mekhanicheskikh i teplovykh svoistv kristallov, Fizmatgiz, M., 1963

[39] Mosunov A. C., “Ispolzovanie termodinamicheskogo podkhoda pri modelirovanii raspyleniya vblizi tochki plavleniya”, Izv. RAN. Fizika, 62:7 (1998), 144–152

[40] Jackson D. P., “Binding energies in cubic metal surfaces”, Radiat. Effect., 18 (1973), 185 | DOI

[41] Hou M., Eckstein W., “Computer simulation of low energy static single crystal sputtering”, NIM B, 13 (1986), 324 | DOI

[42] Odintsov D. D., “O zavisimosti raspyleniya monokristallov ot napravleniya padeniya chastits”, Fizika tverdogo tela, 5 (1963), 1114

[43] Martynenko Yu. V., “K teorii raspyleniya monokristallov”, Fiz. tverdogo tela, 6 (1964), 2003

[44] Lehmann S., Sigmund P., “On the mechanism of sputtering”, Phys. Statist. Solution, 16 (1966), 507 | DOI

[45] Wehner G. K., “Controlled sputtering of metals by low-energy Hg ions”, Phys. Rev., 102 (1956), 690 | DOI

[46] Yurasova B. E., “Sovremennye teorii katodnogo raspyleniya i mikrorelef raspylyaemoi poverkhnosti metalla”, Zh. tekhn. fiz., 28 (1958), 1966

[47] Yurasova V. E., Pleshivtsev N. V., Orfanov I. V., “O napravlennom vykhode chastits pri raspylenii monokristalla medi puchkami ionov s energiei do 50 keV”, Zh. eksperim. i teor. fiz., 37 (1959), 966

[48] Predvoditelev A. A., Spivak G. V., Kotova A. M., Yurasova V. E., “Issledovanie nedekorirovannykh dislokatsii v monokristallakh tsinka s pomoschyu ionnoi bombardirovki”, Fiz. tverdogo tela, 5 (1963), 542