A study of jet formation during the sputtering of electrodes in an arc discharge for the different currents
Vestnik Tomskogo gosudarstvennogo universiteta. Matematika i mehanika, no. 85 (2023), pp. 43-57
Voir la notice de l'article provenant de la source Math-Net.Ru
This work is devoted to experimental and theoretical studies of the sputtering of electrodes in an arc discharge. The temperature distribution in the working chamber during arc discharge is analyzed depending on the discharge current. On the basis of experimental data on the anode sublimation and interelectrode distance, a fan jet is simulated, which is generated during the anode sputtering in an arc discharge. The calculation is carried out using the model describing the processes occurring in the arc plasma, jet propagation, transport of particles by the jet and their ionization. The numerical simulation results for the radial temperature distribution are consistent with the experimental data. The experiments show that an increase in the discharge current leads to an increase in the concentration of fullerenes and graphite structures in the soot. Based on the simulation data, it is shown that this effect is a result of the longer residence time of growing carbon particles in a high-temperature zone (1000-2800 K) at high arc discharge currents.
Keywords:
arc discharge, sputtering, carbon materials.
Mots-clés : graphite structures
Mots-clés : graphite structures
@article{VTGU_2023_85_a3,
author = {V. A. Andryushchenko and E. V. Boyko and S. Z. Sakhapov and M. S. Skirda and D. V. Smovzh},
title = {A study of jet formation during the sputtering of electrodes in an arc discharge for the different currents},
journal = {Vestnik Tomskogo gosudarstvennogo universiteta. Matematika i mehanika},
pages = {43--57},
publisher = {mathdoc},
number = {85},
year = {2023},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/VTGU_2023_85_a3/}
}
TY - JOUR AU - V. A. Andryushchenko AU - E. V. Boyko AU - S. Z. Sakhapov AU - M. S. Skirda AU - D. V. Smovzh TI - A study of jet formation during the sputtering of electrodes in an arc discharge for the different currents JO - Vestnik Tomskogo gosudarstvennogo universiteta. Matematika i mehanika PY - 2023 SP - 43 EP - 57 IS - 85 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/VTGU_2023_85_a3/ LA - ru ID - VTGU_2023_85_a3 ER -
%0 Journal Article %A V. A. Andryushchenko %A E. V. Boyko %A S. Z. Sakhapov %A M. S. Skirda %A D. V. Smovzh %T A study of jet formation during the sputtering of electrodes in an arc discharge for the different currents %J Vestnik Tomskogo gosudarstvennogo universiteta. Matematika i mehanika %D 2023 %P 43-57 %N 85 %I mathdoc %U http://geodesic.mathdoc.fr/item/VTGU_2023_85_a3/ %G ru %F VTGU_2023_85_a3
V. A. Andryushchenko; E. V. Boyko; S. Z. Sakhapov; M. S. Skirda; D. V. Smovzh. A study of jet formation during the sputtering of electrodes in an arc discharge for the different currents. Vestnik Tomskogo gosudarstvennogo universiteta. Matematika i mehanika, no. 85 (2023), pp. 43-57. http://geodesic.mathdoc.fr/item/VTGU_2023_85_a3/