Geodesic
Correlation of errors in optical coating production with broad band monitoring
Numerical methods and programming, Tome 19 (2018) no. 4, pp. 439-448

Voir la notice de l'article provenant de la source Math-Net.Ru

We propose a robust estimate that can be used for the prediction of the expected strength of thickness errors correlation in the case of optical coating production with the direct broad band monitoring of a deposition process. A practical application of this estimate requires statistical analysis. We introduce a computationally efficient simulator of thickness errors that have a random character and are able to adequately represent the correlation of thickness errors by a monitoring procedure. It is shown that the expected strength of thickness errors correlation is estimated by the random value whose distribution is close to the log-normal distribution and that the two main parameters of the log-normal probability density function can be used as the parameters characterizing the investigated effect.
Keywords: inverse problems, optical coating technology, optical monitoring, computer simulation. 
@article{VMP_2018_19_4_a10,
     author = {A. V. Tikhonravov and I. V. Kochikov and I. A. Matvienko and T. F. Isaev and D. V. Lukyanenko and S. A. Sharapova and A. G. Yagola},
     title = {Correlation of errors in optical coating production with broad band monitoring},
     journal = {Numerical methods and programming},
     pages = {439--448},
     publisher = {mathdoc},
     volume = {19},
     number = {4},
     year = {2018},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/VMP_2018_19_4_a10/}
}
TY  - JOUR
AU  - A. V. Tikhonravov
AU  - I. V. Kochikov
AU  - I. A. Matvienko
AU  - T. F. Isaev
AU  - D. V. Lukyanenko
AU  - S. A. Sharapova
AU  - A. G. Yagola
TI  - Correlation of errors in optical coating production with broad band monitoring
JO  - Numerical methods and programming
PY  - 2018
SP  - 439
EP  - 448
VL  - 19
IS  - 4
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/VMP_2018_19_4_a10/
LA  - ru
ID  - VMP_2018_19_4_a10
ER  - 
%0 Journal Article
%A A. V. Tikhonravov
%A I. V. Kochikov
%A I. A. Matvienko
%A T. F. Isaev
%A D. V. Lukyanenko
%A S. A. Sharapova
%A A. G. Yagola
%T Correlation of errors in optical coating production with broad band monitoring
%J Numerical methods and programming
%D 2018
%P 439-448
%V 19
%N 4
%I mathdoc
%U http://geodesic.mathdoc.fr/item/VMP_2018_19_4_a10/
%G ru
%F VMP_2018_19_4_a10
A. V. Tikhonravov; I. V. Kochikov; I. A. Matvienko; T. F. Isaev; D. V. Lukyanenko; S. A. Sharapova; A. G. Yagola. Correlation of errors in optical coating production with broad band monitoring. Numerical methods and programming, Tome 19 (2018) no. 4, pp. 439-448. http://geodesic.mathdoc.fr/item/VMP_2018_19_4_a10/