High performance modeling of modern deposition processes for optical coating nanotechnology
Numerical methods and programming, Tome 13 (2012) no. 4, pp. 491-496
Voir la notice de l'article provenant de la source Math-Net.Ru
Applicability of the method of molecular dynamics (MD) to the simulation of modern processes of deposition of optical coatings is studied. The choice of physical and technological aspects of deposition processes is explained and the most meaningful parameters of computer simulation are estimated. The first results of MD simulation of silica dioxide film growth are discussed. These results demonstrate good perspectives of high performance modeling of deposition processes.
Keywords:
high performance modeling; molecular dynamics; thin films; deposition processes.
@article{VMP_2012_13_4_a1,
author = {A. V. Tikhonravov and I. V. Kochikov and T. V. Amochkina and F. V. Grigor'ev and O. A. Kondakova and V. B. Sulimov},
title = {High performance modeling of modern deposition processes for optical coating nanotechnology},
journal = {Numerical methods and programming},
pages = {491--496},
publisher = {mathdoc},
volume = {13},
number = {4},
year = {2012},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/VMP_2012_13_4_a1/}
}
TY - JOUR AU - A. V. Tikhonravov AU - I. V. Kochikov AU - T. V. Amochkina AU - F. V. Grigor'ev AU - O. A. Kondakova AU - V. B. Sulimov TI - High performance modeling of modern deposition processes for optical coating nanotechnology JO - Numerical methods and programming PY - 2012 SP - 491 EP - 496 VL - 13 IS - 4 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/VMP_2012_13_4_a1/ LA - ru ID - VMP_2012_13_4_a1 ER -
%0 Journal Article %A A. V. Tikhonravov %A I. V. Kochikov %A T. V. Amochkina %A F. V. Grigor'ev %A O. A. Kondakova %A V. B. Sulimov %T High performance modeling of modern deposition processes for optical coating nanotechnology %J Numerical methods and programming %D 2012 %P 491-496 %V 13 %N 4 %I mathdoc %U http://geodesic.mathdoc.fr/item/VMP_2012_13_4_a1/ %G ru %F VMP_2012_13_4_a1
A. V. Tikhonravov; I. V. Kochikov; T. V. Amochkina; F. V. Grigor'ev; O. A. Kondakova; V. B. Sulimov. High performance modeling of modern deposition processes for optical coating nanotechnology. Numerical methods and programming, Tome 13 (2012) no. 4, pp. 491-496. http://geodesic.mathdoc.fr/item/VMP_2012_13_4_a1/