Geodesic
Numerical simulation for the problem of dynamics of oxide film growth in
Numerical methods and programming, Tome 2 (2001) no. 1, pp. 92-111

Voir la notice de l'article provenant de la source Math-Net.Ru

An approximate simulation for the dynamics of oxide film growth in semiconductor substrates is developed. A generalization of the 1D Deal-Grove method to 2D problems is proposed on the basis of geometrical approach. Some numerical results are given for the following cases: 1) the growth of a subregion for SiO2 under oxidation in various mediums (O2 or H2O) and 2) the dynamics of oxide/material and oxide/oxidant boundaries in a wide range of constitutive parameters and nitride masks covering a part of the silicon surface.
Keywords: film growth, material oxidation, nitride masks, numerical simulation, semiconductors. 
@article{VMP_2001_2_1_a6,
     author = {A. L. Alexandrov and G. A. Tarnavskii and S. I. Shpak and A. I. Gulidov and M. S. Obrecht},
     title = {Numerical simulation for the problem of dynamics of oxide film growth in},
     journal = {Numerical methods and programming},
     pages = {92--111},
     publisher = {mathdoc},
     volume = {2},
     number = {1},
     year = {2001},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/VMP_2001_2_1_a6/}
}
TY  - JOUR
AU  - A. L. Alexandrov
AU  - G. A. Tarnavskii
AU  - S. I. Shpak
AU  - A. I. Gulidov
AU  - M. S. Obrecht
TI  - Numerical simulation for the problem of dynamics of oxide film growth in
JO  - Numerical methods and programming
PY  - 2001
SP  - 92
EP  - 111
VL  - 2
IS  - 1
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/VMP_2001_2_1_a6/
LA  - ru
ID  - VMP_2001_2_1_a6
ER  - 
%0 Journal Article
%A A. L. Alexandrov
%A G. A. Tarnavskii
%A S. I. Shpak
%A A. I. Gulidov
%A M. S. Obrecht
%T Numerical simulation for the problem of dynamics of oxide film growth in
%J Numerical methods and programming
%D 2001
%P 92-111
%V 2
%N 1
%I mathdoc
%U http://geodesic.mathdoc.fr/item/VMP_2001_2_1_a6/
%G ru
%F VMP_2001_2_1_a6
A. L. Alexandrov; G. A. Tarnavskii; S. I. Shpak; A. I. Gulidov; M. S. Obrecht. Numerical simulation for the problem of dynamics of oxide film growth in. Numerical methods and programming, Tome 2 (2001) no. 1, pp. 92-111. http://geodesic.mathdoc.fr/item/VMP_2001_2_1_a6/