Numerical modeling and computer algorithm for the process of segregation of alloy impurities at the boundary of an
Numerical methods and programming, Tome 2 (2001) no. 1, pp. 12-26
Cet article a éte moissonné depuis la source Math-Net.Ru
An approach to the approximate modeling of complex physico-chemical processes of segregation of alloy impurities implanted in a base material is considered for the case when an oxidation wave propagates along it. A computer algorithm that realizes this approach is given. Numerical results obtained for the segregation of boron, arsenic, phosphorus, and antimony in silicon at the boundary “silicon/silicon dioxide” are discussed.
Keywords:
processes of segregation, oxidation waves, alloy impurities, numerical simulation, physico-chemical processes.
@article{VMP_2001_2_1_a1,
author = {G. A. Tarnavskii and S. I. Shpak and M. S. Obrecht},
title = {Numerical modeling and computer algorithm for the process of segregation of alloy impurities at the boundary of an},
journal = {Numerical methods and programming},
pages = {12--26},
year = {2001},
volume = {2},
number = {1},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/VMP_2001_2_1_a1/}
}
TY - JOUR AU - G. A. Tarnavskii AU - S. I. Shpak AU - M. S. Obrecht TI - Numerical modeling and computer algorithm for the process of segregation of alloy impurities at the boundary of an JO - Numerical methods and programming PY - 2001 SP - 12 EP - 26 VL - 2 IS - 1 UR - http://geodesic.mathdoc.fr/item/VMP_2001_2_1_a1/ LA - ru ID - VMP_2001_2_1_a1 ER -
%0 Journal Article %A G. A. Tarnavskii %A S. I. Shpak %A M. S. Obrecht %T Numerical modeling and computer algorithm for the process of segregation of alloy impurities at the boundary of an %J Numerical methods and programming %D 2001 %P 12-26 %V 2 %N 1 %U http://geodesic.mathdoc.fr/item/VMP_2001_2_1_a1/ %G ru %F VMP_2001_2_1_a1
G. A. Tarnavskii; S. I. Shpak; M. S. Obrecht. Numerical modeling and computer algorithm for the process of segregation of alloy impurities at the boundary of an. Numerical methods and programming, Tome 2 (2001) no. 1, pp. 12-26. http://geodesic.mathdoc.fr/item/VMP_2001_2_1_a1/