Numerical simulation of the high-frequency capacitive discharge

V. Yu. Chebakova

Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki, Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki, Tome 157 (2015) no. 2, pp. 126-140

Résumé

The nonlinear problem of determining the interaction parameters between the high-frequency capacitive discharge and the sample placed on a substrate in the local approximation is considered. The problem is described by a system of nonlinear initial-value problems. A numerical method for solving this problem is suggested. The results of numerical experiments for the model problem are given. Comparative analysis of these results with the characteristics of the high-frequency capacitive discharge without the sample is carried out.

Détail

Keywords: mathematical simulation, high-frequency capacitive discharge, electric field strength, electronic and gas temperature, numerical experiments.
Mots-clés : concentration of electrons, concentration of ions

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