Geodesic
Numerical simulation of the high-frequency capacitive discharge
Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki, Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki, Tome 157 (2015) no. 2, pp. 126-140

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The nonlinear problem of determining the interaction parameters between the high-frequency capacitive discharge and the sample placed on a substrate in the local approximation is considered. The problem is described by a system of nonlinear initial-value problems. A numerical method for solving this problem is suggested. The results of numerical experiments for the model problem are given. Comparative analysis of these results with the characteristics of the high-frequency capacitive discharge without the sample is carried out.
Keywords: mathematical simulation, high-frequency capacitive discharge, electric field strength, electronic and gas temperature, numerical experiments.
Mots-clés : concentration of electrons, concentration of ions 
@article{UZKU_2015_157_2_a10,
     author = {V. Yu. Chebakova},
     title = {Numerical simulation of the high-frequency capacitive discharge},
     journal = {U\v{c}\"enye zapiski Kazanskogo universiteta. Seri\^a Fiziko-matemati\v{c}eskie nauki},
     pages = {126--140},
     publisher = {mathdoc},
     volume = {157},
     number = {2},
     year = {2015},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/UZKU_2015_157_2_a10/}
}
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V. Yu. Chebakova. Numerical simulation of the high-frequency capacitive discharge. Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki, Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki, Tome 157 (2015) no. 2, pp. 126-140. http://geodesic.mathdoc.fr/item/UZKU_2015_157_2_a10/