Two-dimensional model of a non-equilibrium strongly non-uniform microwave discharge in a DC external field

Yu. A. Lebedev   ; A. V. Tatarinov   ; A. Yu. Titov   ; I. L. Epstein

Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki, Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki, Tome 156 (2014) no. 4, pp. 120-132

Résumé

A self-consistent model of a non-equilibrium strongly inhomogeneous microwave discharge is described. The model is based on the simultaneous solution of the Maxwell equations, Poisson equation, Boltzmann equation for free plasma electrons, and the equations describing the vibrational kinetics and the kinetics of excited and charged particles in hydrogen plasma. The results of the first calculations are presented, which are in qualitative agreement with the experimental data.

Détail

Keywords: microwave plasma, discharge in hydrogen, self-consistent modeling, non-equilibrium plasma.

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