Geodesic
Modeling of a High-Frequency Capacitive Discharge with a Large Inter-Electrode Distance. I. Statement of the Problem
Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki, Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki, Tome 155 (2013) no. 2, pp. 123-130

Voir la notice du chapitre de livre provenant de la source Math-Net.Ru

We construct a one-dimensional mathematical model of a transient high-frequency low-pressure plasma, which makes it possible to determine the basic characteristics of the plasma in a high-frequency low-pressure capacitive discharge with a large inter-electrode distance and describe the plasma's behavior in the near-electrode regions taking into account the heating of the gas.
Keywords: mathematical modeling, high-frequency low-pressure capacitive discharge, electric field strength, electronic and gas temperature
Mots-clés : concentration of electrons, ions. 
@article{UZKU_2013_155_2_a10,
     author = {I. Sh. Abdullin and V. S. Zheltukhin and V. Yu. Chebakova and M. N. Shneider},
     title = {Modeling of a {High-Frequency} {Capacitive} {Discharge} with a {Large} {Inter-Electrode} {Distance.} {I.} {Statement} of the {Problem}},
     journal = {U\v{c}\"enye zapiski Kazanskogo universiteta. Seri\^a Fiziko-matemati\v{c}eskie nauki},
     pages = {123--130},
     publisher = {mathdoc},
     volume = {155},
     number = {2},
     year = {2013},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/UZKU_2013_155_2_a10/}
}
TY  - JOUR
AU  - I. Sh. Abdullin
AU  - V. S. Zheltukhin
AU  - V. Yu. Chebakova
AU  - M. N. Shneider
TI  - Modeling of a High-Frequency Capacitive Discharge with a Large Inter-Electrode Distance. I. Statement of the Problem
JO  - Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki
PY  - 2013
SP  - 123
EP  - 130
VL  - 155
IS  - 2
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/UZKU_2013_155_2_a10/
LA  - ru
ID  - UZKU_2013_155_2_a10
ER  - 
%0 Journal Article
%A I. Sh. Abdullin
%A V. S. Zheltukhin
%A V. Yu. Chebakova
%A M. N. Shneider
%T Modeling of a High-Frequency Capacitive Discharge with a Large Inter-Electrode Distance. I. Statement of the Problem
%J Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki
%D 2013
%P 123-130
%V 155
%N 2
%I mathdoc
%U http://geodesic.mathdoc.fr/item/UZKU_2013_155_2_a10/
%G ru
%F UZKU_2013_155_2_a10
I. Sh. Abdullin; V. S. Zheltukhin; V. Yu. Chebakova; M. N. Shneider. Modeling of a High-Frequency Capacitive Discharge with a Large Inter-Electrode Distance. I. Statement of the Problem. Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki, Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki, Tome 155 (2013) no. 2, pp. 123-130. http://geodesic.mathdoc.fr/item/UZKU_2013_155_2_a10/