Geodesic
Modeling of a High-Frequency Capacitive Discharge with a Large Inter-Electrode Distance. I. Statement of the Problem
Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki, Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki, Tome 155 (2013) no. 2, pp. 123-130 Cet article a éte moissonné depuis la source Math-Net.Ru

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We construct a one-dimensional mathematical model of a transient high-frequency low-pressure plasma, which makes it possible to determine the basic characteristics of the plasma in a high-frequency low-pressure capacitive discharge with a large inter-electrode distance and describe the plasma's behavior in the near-electrode regions taking into account the heating of the gas.
Keywords: mathematical modeling, high-frequency low-pressure capacitive discharge, electric field strength, electronic and gas temperature
Mots-clés : concentration of electrons, ions. 
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     title = {Modeling of a {High-Frequency} {Capacitive} {Discharge} with a {Large} {Inter-Electrode} {Distance.} {I.} {Statement} of the {Problem}},
     journal = {U\v{c}\"enye zapiski Kazanskogo universiteta. Seri\^a Fiziko-matemati\v{c}eskie nauki},
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     url = {http://geodesic.mathdoc.fr/item/UZKU_2013_155_2_a10/}
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I. Sh. Abdullin; V. S. Zheltukhin; V. Yu. Chebakova; M. N. Shneider. Modeling of a High-Frequency Capacitive Discharge with a Large Inter-Electrode Distance. I. Statement of the Problem. Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki, Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki, Tome 155 (2013) no. 2, pp. 123-130. http://geodesic.mathdoc.fr/item/UZKU_2013_155_2_a10/

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