Geodesic
Calculation of gas dynamics of streams of a radio-frequency plasma at low pressure
Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki, Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki, Tome 153 (2011) no. 4, pp. 135-142

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This work describes a model of the RF plasma flow in a transient mode at a pressure of $P=13.3$–$133$ Pa with a Knudsen number in a range of $8\cdot10^{-3}\leq\mathrm{Kn}\leq7\cdot10^{-2}$. The model is built using the statistical approach. The results of calculations of the plasma neutral component flow in an undisturbed stream and at specimen circumfluence are presented.
Keywords: mathematical modeling, RF plasma, low pressure, stream flow, transient mode, Monte-Carlo method, statistical modeling. 
@article{UZKU_2011_153_4_a12,
     author = {V. S. Zheltukhin and A. Yu. Shemakhin},
     title = {Calculation of gas dynamics of streams of a~radio-frequency plasma at low pressure},
     journal = {U\v{c}\"enye zapiski Kazanskogo universiteta. Seri\^a Fiziko-matemati\v{c}eskie nauki},
     pages = {135--142},
     publisher = {mathdoc},
     volume = {153},
     number = {4},
     year = {2011},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/UZKU_2011_153_4_a12/}
}
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V. S. Zheltukhin; A. Yu. Shemakhin. Calculation of gas dynamics of streams of a radio-frequency plasma at low pressure. Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki, Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki, Tome 153 (2011) no. 4, pp. 135-142. http://geodesic.mathdoc.fr/item/UZKU_2011_153_4_a12/